SBIR Phase I: Flexural Hydraulic Actuators

9860826 来自Mini-Surgery，Incorporated的这个小型企业创新研究第一阶段项目提出了一种具有显着性能和成本优势的微机电系统（“MEMS”）弯曲微液压致动器的开发。 基于MEMS的致动器设计使得能够使用低成本的大批量平面制造技术，例如薄膜沉积和蚀刻、研磨和抛光，用于从厘米级到亚毫米级的生产。 在毫米到厘米的尺度上，这些装置的生产成本比传统的液压致动器低几个数量级。 与传统的致动器和微电机相比，所提出的新型、微型、轻质、低维护致动器的设计提供了上级可靠性、速度和力。 该执行器适用于许多医疗、汽车、航空航天和工业设备中的阀门、泵、压缩机、电动机和传感器。

9860826 This Small Business Innovation Research Phase I project from Mini-Surgery, Incorporated proposes the development of a Micro-ElectroMechnical System ("MEMS") flexural microhydraulic actuator with significant performance and cost advantages. The MEMS-based actuator design enables the use of low-cost large-batch planar manufacturing techniques such as thin film deposition and etching, lapping, and polishing for production from centimeter-scale to sub-millimeter scale. At the millimeter-to-centimeter scale, these devices could be produced at orders of magnitude lower cost than conventional hydraulic actuators. The proposed design for a novel, miniature, lightweight, low maintenance actuator offers superior reliability, speed, and force compared to conventional actuators and micromotors. The actuator is targeted for valves, pumps, compressors, electric motors, and sensors in many medical, automotive, aerospace, and industrial devices.