CAREER: A Study of Temperature in Rapid Thermal Engineering of Glass Films

首席研究员建议研究用于微技术的玻璃膜的脉冲激光沉积和热处理。 热工程是用于控制薄膜的热物理、电学、光学和机械性质的唯一最强大的技术。 在玻璃膜的脉冲激光沉积和加工中，时间尺度和能量级联过程阻止经典平衡输运的概念提供对过程的某些方面的甚至一阶精确描述。 本课程将探索微尺度系统中的多个“温度”，并建立特征值之间的相互关系。 典型的问题，如什么是玻璃的微结构温度和用于存款膜的蒸汽的平移温度之间的关系，以及如何是一个蒸汽羽流的平移温度相关的温度的溅射目标将被检查。 将研究加工温度可以控制薄膜性能的方面。与研究相结合的是一个将机械工程师的核心能力扩展到包括微尺度热工程的计划。 该课程“物质的热性质”将被开发，以提供一个非平凡的背景到能量存储和运输在原子水平。 本课程将结合联合收割机新的加工技术和对微尺度热科学的基本理解。

The principal investigator proposes to study pulsed laser deposition and thermal processing of glass films for micro-technologies. Thermal engineering is the single most powerful technique for controlling the thermo- physical, electrical, optical, and mechanical properties of films. In pulsed laser deposition and processing of glass films, the time-scale and the energy cascade process prevent notions of classical equilibrium transport from providing even a first order accurate description of some aspects of processes. This program will explore the plurality of "temperature" in microscale systems, and establish interrelationships between characteristic values. Typical questions such as what is the relationship between the microstructural temperature of a glass and the translational temperature of the vapor used to deposit the film and how is the translational temperature of a vapor plume related to the temperature of the sputttering target will be examined. Facets by which the processing temperatures can control film properties will be studied.Coupled with the research is a program to expand the core competencies of mechanical engineers to include microscale thermal engineering. The course "Thermal Nature of Matter" will be developed to give a nontrivial background into energy storage and transport at the atomic level. This class will combine new processing techniques with a fundamental understanding of microscale thermal science.