AFM-assisted, Nanometer-scale Modification of Semiconductor Chips

William A.Ducker，弗吉尼亚理工大学化学系Michael A.Calter，罗彻斯特大学化学系NSF Proposal 9980770；弗吉尼亚理工大学Proposal 99-1519-02 AFM辅助的纳米级半导体芯片修改本工程微系统公司的目标是开发一种用于在非常小的尺度上书写的新技术(纳米光刻)，并应用纳米光刻技术在电极上构建细胞膜。酶安装在原子力显微镜(AFM)力传感器的工作尖端，这些酶用于在显微镜指示的特定位置执行特定的化学反应。最初的目标是在保持化学反应活性的同时将酶连接到尖端，并合成一种易于被酶修饰的表面膜。原子力显微镜也被用来验证写入过程的准确性。为了保护精致的酶尖端，一种有两个独立探针的原子力显微镜正在开发中。一个探头用于写入，另一个探头用于在同一位置读取。酶辅助纳米光刻技术将用于在半导体芯片上制造细胞膜。支撑细胞膜的天然细胞支架将通过AFM酶尖端连接到芯片上，在特定位置进行反应。具有高空间和化学特异性的书写技术的发展增强了我们制造微型化电子元件和进行平行药物筛选的能力。开发一种逼真的芯片安装膜是制备生物传感器的关键步骤。

William A. Ducker, Department of Chemistry, Virginia TechMichael A. Calter, Department of Chemistry, University of RochesterNSF Proposal 9980770; Virginia Tech Proposal 99-1519-02AFM -assisted, Nanometer-scale Modification of Semiconductor ChipsThe goal of this Engineering Microsystems: "XYZ" on a Chip project is to develop a new technique for writing on a very small scale (nanolithography), and to apply nanolithography to the construction of a cell membrane on an electrode. Enzymes are mounted on the working tip of an Atomic Force Microscope (AFM) force sensor and the enzymes are used to perform a specific chemical reaction at a specific location dictated by the microscope. The initial objectives are to attach enzymes to the tips while maintaining chemical reactivity, and to synthesize a surface film that is easily modified by the enzyme. An AFM is also used to verify the accuracy of the writing process. To protect the delicate enzyme-tip, an AFM that has two separate probes is being developed. One probe is for writing and one is for reading in the same location. The enzyme-assisted nanolithographic technique will be used to fabricate a cell membrane on a semiconductor chip. The natural cell scaffold that supports the cell membrane will be attached to the chip by using the AFM enzyme tip to perform reactions at specific locations.The development of writing techniques with high spatial and chemical specificity enhances our ability to manufacture miniaturize electronic components and to perform parallel drug screening. The development of a realistic chip-mounted membrane is a key step in the preparation of biosensors.