Interface and Evolution Methods For Semiconductor Processing

研究工作将涉及半导体制造的数学和数值方面，特别是研究微观结构可靠性问题，包括电迁移和化学机械抛光方面。这项工作将结合数学建模来产生合理的物理模型，完成适当的边界条件和内部动力学，以及数值算法，部分依赖于曲面演化算法和不规则域的椭圆求解器。目标是进行数值模拟，并与实验进行比较。摩托罗拉公司的L. Borucki将获得加州大学伯克利分校数学系的高级研究奖学金。该GOALI项目由MPS多学科活动办公室（OMA）和数学科学司（DMS）联合支持。

The research work will concern mathematical and numerical aspects of semiconductor manufacturing, specifically to work on problems of microstructural reliability, including aspects of electromigration and chemical mechanical polishing. The work will be combination of mathematical modeling to produce reasonable physical models, complete with appropriate boundary conditions and internal dynamics, and numerical algorithms, in part relying on algorithms for surface evolution and elliptic solvers in irregular domains. The goal will be numerical simulations and comparisons with experiment.Dr. L. Borucki from Motorola Corporation will take this Senior Research Fellowship in the Department of Mathematics at the University of California- Berkeley. This GOALI project is jointly supported by the MPS Office of Multidisciplinary Activities (OMA) and the Division of Mathematical Sciences (DMS).