SBIR Phase I: Innovative And Cost-Effective Process for Net-Shape Microfabrication of Ceramic Components

这个小企业创新研究第一阶段项目将为两个不同的工业部门开发和表征一种新型陶瓷材料和微元件制造技术：光纤通信行业和化学工业。目前主要基于硅加工技术的微部件制造工艺是昂贵的，并且通常不满足光学部件（光纤连接器、分束器）制造所需的生产率，或者不具备化学工业应用（用于气体分离/重整的微通道装置）所需的高温性能。该项目的目标是开发一种成本效益高的技术，用于性能和/或生产效率与硅技术相当或上级的组件的微制造。该工艺将使用低温、净形制造技术，预计该技术将是高效的、具有成本效益的、可扩展的和环境友好的（无副产品）。商业利益将是硅加工技术的替代品。使用这种材料/技术制造的组件的高生产能力和严格的尺寸公差使其成为光纤组件制造商的一个有吸引力的选择。陶瓷的高可实现的表面积和固有的热化学稳定性使得这种材料对于制造用于气体分离/重整的微通道装置非常有吸引力。

This Small Business Innovation Research Phase I project will develop and characterize a novel ceramic material and microcomponent fabrication technique for two different industrial sectors: the fiber-optic communications industry and the chemical industry. Current processes for microcomponent fabrication, primarily based on silicon processing technology are expensive, and often do not meet the production rates required for optical component (fiber-connectors, beam splitters) fabrication or possess the desired high-temperature performance for chemical industry applications (micro-channel devices for gas separation/reforming). The objective of this project is to develop a cost-effective technique for microfabrication of components with properties and/or production efficiency comparable to or superior than silicon technology. The process will use a low-temperature, net-shape fabrication technique that is expected to be efficient, cost-effective, scalable and environmentally friendly (no-byproducts). The commercial benefits will be an alternative to silicon processing technology. The high production capacity and tight dimensional tolerances for components fabricated using this material/technique makes it an attractive option for optic fiber component manufacturers. The high achievable surface areas and the inherent thermochemical stability of ceramics make this material very attractive for fabrication of microchannel devices for gas separation/reformation.