SBIR Phase I: High-Temperature Gas Sensors with Enhanced Stability

这个小企业创新研究第一阶段项目的重点是开发用于高温应用的高度稳定和敏感的金属氧化物半导体传感器。为了有足够的响应时间和必要的选择性，目前可用的半导体传感器通常限制在200℃至500℃范围内。为了在600℃至900℃范围内工作，必须增强多孔传感材料的稳定性，以便具有快速响应，灵敏的传感器。在该项目中，将首先开发独特的纳米复合传感器材料，然后制备具有高温电极的衬底，然后将传感器薄膜沉积在其上，然后评估其灵敏度，响应时间和稳定性。开发的传感器将适用于高温发动机的控制和监测，化石燃料发电厂和焚化炉的燃烧系统控制，以及化学过程反应堆的产品气体监测。

This Small Business Innovation Research Phase I project is focused on the development of highly stable and sensitive metal oxide semiconductor sensors for high-temperature applications. Currently available semiconductor sensors are typically restricted to the 200 C to 500 C range in order to have adequate response times and the necessary selectivity. In order to operate in the 600 C to 900 C range, stability of the porous sensing materials has to be enhanced in order to have a fast responding, sensitive sensor. In the project, the unique nanocomposite sensor materials will be developed first, followed by preparation of the substrate with high temperature electrodes, on to which the sensor film is deposited and then evaluated for sensitivity, response time and stability. The sensors to be developed will be applicable to high temperature engine control and monitoring, combustion system control for fossil-fueled power plants and incinerators, and monitoring of product gases from chemical process reactors.