GOALI: Mechanisms and Optimization of Laser Assisted Particle Removal

建议编号：CTS-0218024机构：佛罗里达州立大学PI名称：S.Allen，L.Gelb和M.HussainiNSF计划名称：颗粒和多相工艺标题：激光辅助颗粒去除的机理和优化脱除超细颗粒，特别是在纳米尺度上去除超细颗粒，对半导体行业和其他制造表面清洁材料的行业构成了挑战。激光辅助颗粒去除(LAPR)是一种在其他方法失效的情况下有效去除细小颗粒的有效方法。根据激光能量转移的位置和粒子从表面分离的方式，激光等离子体反应被PI分为四种机制。拟议的GALI项目的目标是通过实验和计算分析来研究LAPR的物理化学机制。将开发一个模型，以清楚地解释取决于激光波长、颗粒大小和颗粒周围介质特性的能量转移和颗粒去除的基本物理原理。

Proposal Number: CTS-0218024Institution: Florida State UniversityPI Name: S. Allen, L. Gelb, and M. HussainiNSF Program name: Particulate and Multiphase ProcessesTitle: Mechanisms and Optimization of Laser Assisted Particle RemovalABSTRACTRemoval of ultrafine particles, particularly in the nanoscale, pose a challenge to the semiconductor industry and other industries manufacturing material with clean surfaces. The laser assisted particle removal (LAPR) is a promising method for efficient removal of fine particles when other methods fail. Depending on where the laser energy is transferred and how the particle is separated from the surface, the LAPR is categorized by the PIs into four mechanisms. The objective of the proposed GOALI project is to investigate the physiochemical mechanisms of LAPR by experiments and computational analyses. A model will be developed to clearly explain the underlying physics of energy transfer and particle removal depending on the laser wavelength, particle size and the characteristics of medium surrounding the particle.