Integration of Wear-resistant and Anti-stiction Coatings Deposited from Waterborne Chemistries into Micro-electromechanical System Fabrication Processes

本研究的目的是开发双相耐磨抗粘涂层的化学和技术；在多晶硅MEMS基础结构从水介质。在不同温度和湿度条件下，通过表征涂层表面的疏水性来评估抗粘滞性能。利用摩擦力显微镜研究涂层的摩擦磨损性能。通过与桑迪亚国家实验室（GOALI的合作伙伴）合作，涂层将应用于测试结构，涂层表面之间的磨损将使用微摩擦计设备进行测量。利用原子计算机模拟方法，即分子动力学，探讨涂层的化学结构与其摩擦磨损性能之间的关系。设计抗粘耐磨涂层首先要将分子结构、涂层结构和形态与薄膜性能联系起来。分子水平模拟的目的是了解涂层在滑动过程中的结构演变，以及揭示动态摩擦条件下抗粘膜的摩擦化学过程。建模工作是由于需要将模拟的抗粘涂层的摩擦和磨损性能与实验观察结果进行比较，并在实验无法达到的尺度上进一步了解物理和化学。该研究项目将为研究生、本科生和博士后提供教育和研究机会。该研究项目的主要研究人员在通过常规和REU研究项目让代表性不足的少数民族和女性学生参与他们的研究项目方面有着悠久的历史。这项工作的结果将用于增强材料科学与工程系应用表面化学和原子计算技术课程的内容，以及用于亚利桑那大学集成电路制造课程的教学模块。

The objective of the proposed research is to develop the chemistry and techniques for the application of duplex wear resistant and anti-stiction coatings; onto polysilicon MEMS based structures from aqueous media. The anti-stiction properties will be evaluated through a characterization of the hydrophobicity of the coated surfaces under different temperature and humidly conditions. Friction and wear properties of the deposited coatings will be investigated using friction force microscopy. By working in collaboration with Sandia National Laboratories, a GOALI partner in the proposed research, coatings will be applied to test structures and the wear between coated surfaces will be measured using a microtribometer device. Using atomistic computer simulation methods, viz. molecular dynamics, the relation between the chemical structure of coatings and their friction/wear properties will be explored. Designing anti-stiction and wear resistant coating begins with linking molecular structures, coating structure and morphology to film properties. Objectives of molecular level simulations are to understand the evolution of the coating structure during sliding as well as shedding light on the tribo-chemical processes in the anti-stiction film under dynamic rubbing conditions. The modeling work is driven by a need to compare simulated friction and wear properties of anti-stiction coating with experimental observations and gaining further insight into the physics and chemistry at scales inaccessible by experiments.The research project will provide educational and research opportunities to graduate, undergraduate and post-doctoral students. The principal investigators of the research program have a strong history of involving underrepresented minority and female students in their research program through regular and REU research programs. The results from this work will be used to enhance the content of courses in applied surface chemistry and atomistic computation techniques taught in the department of Materials Science and Engineering as well as a teaching module for use in an IC fabrication class taught at the University of Arizona.