Waterbone Self-Assembled Monolayer Films for Stiction Reduction in Silicon Based Micro-Electromechanical Structures

用于减少硅基微机电结构中静摩擦的水骨自组装单层薄膜

• 批准号: 9905957
• 负责人: Srini Raghavan
• 金额: $ 23万
• 依托单位: University of Arizona
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 1999
• 资助国家: 美国
• 起止时间: 1999-08-01 至 2002-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9905957&HistoricalAwards=false
• 关键词: Waterbone; Self; Assembled; Monolayer; Films

9905957RaghavanThe objective of the proposed research is to develop chemistry and techniques for the application of hydrophobic coatings onto polysilicon based MEMS structures from aqueous media. The chemical system would consist of two micelle-forming components, a water-soluble silane and a surfactant, dissolved in an aqueous solution. By using pH as a master variable, the attachment of silane micelles as a monolayer would be effected. Using Monte Carlo simulations, the effect of the chemical structure of the surfactant and silane on the attachment will be analyzed and optimal conditions for attachment will be explored. The applied coatings will be tested for various characteristics such as hydrophobicity, orientation, and stability. The metric for the success of the proposed research program is the identification of conditions required for the formation of thermally stable, highly hydrophobic (water contact angles of greater than 120) coatings which, when applied to polysilicon surfaces, are capable of preventing drying and in-use stiction.The Sensor Products Division of Motorola located in Phoenix is the industrial (GOALI) partner in this research program. Motorola will facilitate testing of the developed coatings in micromachined structures such as cantilever beam arrays and in products such as accelerometers. The industrial partner will assess the compatibility of the chemicals used and processes developed in the research program with commercial fabrication environments.It is anticipated that the proposed research program with Motorola as the industrial partner, will provide an excellent opportunity for the principal investigator, his students and collaborators to contribute to scientific knowledge and solutions to a problem of great importance to industries involved in the manufacture of MEMS structures. The students involved in the project will gain knowledge in the area of applied surface chemistry, coatings and Monte Carlo simulations and will be able to apply this knowledge to an important industrial problem. Additionally, the interaction with the industry will present the students a very valuable opportunity to learn about the different facets of an industrial process.***

9905957 Raghavan提出的研究的目的是开发化学和技术的应用程序的疏水涂层多晶硅为基础的MEMS结构从水介质。该化学体系将由两种胶束形成组分组成，即溶解在水溶液中的水溶性硅烷和表面活性剂。通过使用pH作为主变量，硅烷胶束作为单层的附着将受到影响。使用Monte Carlo模拟，将分析表面活性剂和硅烷的化学结构对附着的影响，并探索附着的最佳条件。将测试所涂覆的涂层的各种特性，例如疏水性、取向和稳定性。建议的研究计划的成功的衡量标准是确定形成热稳定，高疏水性（水接触角大于120）涂层，当应用到多晶硅表面，能够防止干燥和使用中的stiction.The传感器产品部门的摩托罗拉公司位于凤凰城是工业（GOALI）在这项研究计划的合作伙伴所需的条件。摩托罗拉将促进微机械结构（如悬臂梁阵列）和加速计等产品中开发的涂层的测试。工业合作伙伴将评估研究计划中使用的化学品和开发的工艺与商业制造环境的兼容性。预计摩托罗拉作为工业合作伙伴的拟议研究计划将为首席研究员提供一个极好的机会，他的学生和合作者为科学知识和解决对制造业非常重要的问题做出贡献MEMS结构。参与该项目的学生将获得应用表面化学，涂层和蒙特卡罗模拟领域的知识，并将能够将这些知识应用于重要的工业问题。此外，与行业的互动将为学生提供一个非常宝贵的机会，了解工业过程的不同方面。