Waterbone Self-Assembled Monolayer Films for Stiction Reduction in Silicon Based Micro-Electromechanical Structures

9905957Raghavan拟议研究的目标是开发从水介质中将疏水涂层应用于基于多晶硅的MEMS结构的化学和技术。该化学体系将由两个胶束形成组分组成，一个是水溶性硅烷，一个是表面活性剂，溶解在水溶液中。通过使用pH作为主变量，硅烷胶束作为单分子层的附着将被实现。通过蒙特卡罗模拟，分析了表面活性剂和硅烷的化学结构对吸附的影响，并探索了最佳的吸附条件。应用的涂层将进行各种特性测试，如疏水性、方向性和稳定性。衡量拟议研究计划成功与否的标准是确定形成热稳定、高度疏水(水接触角大于120)的涂层所需的条件，这些涂层在应用于多晶硅表面时，能够防止干燥和使用中的粘连。摩托罗拉位于凤凰城的传感器产品部是该研究计划的工业(目标)合作伙伴。摩托罗拉将促进在微机械结构(如悬臂梁阵列)和产品(如加速计)中测试开发的涂层。工业合作伙伴将评估研究计划中使用的化学品和开发的工艺与商业制造环境的兼容性。预计以摩托罗拉为工业合作伙伴的拟议研究计划将为首席研究人员、他的学生和合作者提供一个极好的机会，帮助他们提供科学知识和解决对涉及MEMS结构制造的行业非常重要的问题的解决方案。参与该项目的学生将获得应用表面化学、涂层和蒙特卡罗模拟领域的知识，并将能够将这些知识应用于一个重要的工业问题。此外，与行业的互动将为学生提供一个非常宝贵的机会来了解工业过程的不同方面。*

9905957RaghavanThe objective of the proposed research is to develop chemistry and techniques for the application of hydrophobic coatings onto polysilicon based MEMS structures from aqueous media. The chemical system would consist of two micelle-forming components, a water-soluble silane and a surfactant, dissolved in an aqueous solution. By using pH as a master variable, the attachment of silane micelles as a monolayer would be effected. Using Monte Carlo simulations, the effect of the chemical structure of the surfactant and silane on the attachment will be analyzed and optimal conditions for attachment will be explored. The applied coatings will be tested for various characteristics such as hydrophobicity, orientation, and stability. The metric for the success of the proposed research program is the identification of conditions required for the formation of thermally stable, highly hydrophobic (water contact angles of greater than 120) coatings which, when applied to polysilicon surfaces, are capable of preventing drying and in-use stiction.The Sensor Products Division of Motorola located in Phoenix is the industrial (GOALI) partner in this research program. Motorola will facilitate testing of the developed coatings in micromachined structures such as cantilever beam arrays and in products such as accelerometers. The industrial partner will assess the compatibility of the chemicals used and processes developed in the research program with commercial fabrication environments.It is anticipated that the proposed research program with Motorola as the industrial partner, will provide an excellent opportunity for the principal investigator, his students and collaborators to contribute to scientific knowledge and solutions to a problem of great importance to industries involved in the manufacture of MEMS structures. The students involved in the project will gain knowledge in the area of applied surface chemistry, coatings and Monte Carlo simulations and will be able to apply this knowledge to an important industrial problem. Additionally, the interaction with the industry will present the students a very valuable opportunity to learn about the different facets of an industrial process.***