PECASE: Development of Advanced MEMS Actuator Technology for Microrobotics

提案标题：PECASE：开发用于微型机器人的先进MEMS致动器技术机构：马里兰大学园区这份提案旨在为微型机器人、飞行微设备和微操作开发一种基于介电弹性体的新型致动器技术。这将需要开发新的制造工艺。我将：工艺的进步将使我们能够设计和制造三种基本的微致动器部件：1.平面外致动器，这也将允许测量致动器指标，为设备建模提供必要的数据。2.弯曲驱动器，用于实现六自由度运动的新型关节结构。3.可以有效地与硅MEMS器件耦合的面内执行器。广泛影响研究：使用介电弹性体执行器的动机是它们坚韧、柔顺，并且具有极高的效率，而现有的微执行器要么太脆，无法传递接触载荷，要么消耗太多电力，无法携带自己的电源。电介质弹性体执行器本身也具有传感器的功能。因此，拟议的研究将使实现稳健的自主执行器成为可能，MEMS设备可以使用这些执行器来行走、操纵甚至飞行，这将影响到不同的领域。教育：我将采用探究式教学方法，以改善学习结果。学生将制定他们自己的项目，并使用在课程中获得的知识来实现他们的目标。这些项目将使学生接触到实际的研究经验。这种方法将首先在由两部分组成的本科MEMS课程中实施，在该课程中，学生设计和制造蚂蚁形状的行走微设备的原始积木。这些部件将是执行器，包括腿、操纵手臂和喷射化学物质的自卫系统。本课程将使用介电弹性体的研究，学生的设备将推动研究，将研究与教学紧密结合。更广泛的课程开发工作将在密歇根大学建立一个全面的MEMS核心项目。该项目最初是作为职业奖资助的，并于2004年9月转变为总统工程师和科学家早期职业奖(PECASE)奖。

Proposal Title: PECASE: Development of Advanced MEMS Actuator Technology for MicroroboticsInstitution: University of Maryland College ParkIntellectual MeritThis PECASE proposal addresses the development of a new actuator technology based on dielectric elastomers for microrobotics, flying microdevices, and micromanipulation. This will require the development of new fabrication processes. I shall: The processing advances will permit us to design and fabricate three types of elementary micro- actuation components: 1. Out-of-plane actuators, which will also allow the measurement of actuator metrics that provide data essential for device modeling. 2. Bending actuators, which will be used to realize novel articulated structures with 6 degree-of-freedom movement. 3. In-plane actuators that can be effectively coupled with Si MEMS devices.Broader ImpactResearch: The motivation for using dielectric elastomers actuators is that they are tough and compliant and have an extraordinarily high efficiency, whereas existing microactuators are either too brittle to transmit contact loads or consume too much power to carry their own power supplies. Dielectric elastomer actuators also inherently function as sensors. The proposed research will therefore make possible the realization of robust, autonomous actuators that MEMS devices can use for walking, manipulating, and perhaps flying, which will impact diverse fields.Education: I will adopt inquiry-based teaching methods in order to improve learning outcomes. Students will formulate their own projects and use knowledge gained during the course to accomplish their objectives. These projects will expose students to actual research experiences. This approach will first be implemented in a 2-part undergraduate MEMS course in which students design and fabricate original building blocks of an ant-like, walking microdevice. These components will be the actuators, including legs, manipulating arms, and chemical-squirting self-defense system. The dielectric elastomer research will be utilized in the course, and the student's devices will advance the research, closely integrating the research and education. A broader curriculum development effort will establish a comprehensive MEMS core program at UMD.This project was originally funded as a CAREER award, and was converted to a Presidential Early Career Award for Engineers and Scientists (PECASE) award in September 2004.