Meeting Educational Milestones - Enhancing multidisciplinary undergraduate microelectronic education using a "heads-on" MEMS laboratory experience

跨学科（99）这个项目是提高学生在微电子和真空技术的基本原理的理解，使用“头上和动手”微机电（MEMS）实验室模块，学生设计，建模，制造和评估研究为导向的MEMS器件。 熟练的专业人员在微细加工领域是提高学生的认知理解的最终结果。 通过调整绿色和艾伦在圣何塞州立大学“电子材料和设备跨学科课程的开发：没有食谱的烹饪”中制定的教学方法，正在实现这一目标。 新开发的实验室模块以团队为导向，以研究为基础的经验，学生自己设计，制造和测试微机电设备。 由于其多学科的特点，该项目在几个STEM学科中产生了广泛的影响。

Interdisciplinary (99) This project is enhancing student understanding of the underlying principles in microelectronics and vacuum technology using a "heads-on and hands-on" microelectromechanical (MEMS) laboratory module where students design, model, fabricate, and evaluate research-oriented MEMS devices. Skilled professionals in the area of microfabrication are the ultimate result of enhanced student cognitive understanding. The objective is being accomplished by adapting the teaching methods instituted by Green and Allen in "Development of an Interdisciplinary Curriculum in Electronic Materials and Devices: Cooking Without Recipes" at San Jose State University. The newly developed laboratory modules feature a team-oriented, research-based experience with the students themselves designing, fabricating, and testing a microelectromechanical device. Because of its multidisciplinary character the project is having a broad impact across several STEM disciplines.