Adaption, Implementation & Enhancement of Multidisciplinary MEMS Curriculum for Undergraduate Electrical, Mechanical & Microelectronics Engineering Students

电气电气（55）-这个项目是适应和加强课程内容和配套实验室的成功微机电系统（MEMS）课程开发的UM安阿伯和加州大学伯克利分校。MEMS基础和应用正在涵盖在一个新的介绍性多学科的“MEMS设计”课程（伴随MEMS CAD模块实验室）。本课程是准备学生的两个课程序列-“MEMS制造”和“MEMS系统评估”-与MEMS CAD和制造模块实验室。这些MEMS实验室正在现有的罗切斯特理工学院（RIT）微系统制造设施中进行。“MEMS制造”和“MEMS系统评估”课程是UM安阿伯“MEMS入门”和“集成微系统实验室”课程的改编和增强版本。需要调整的资源包括课堂笔记，各种实验室实验，CAD工具，手册，项目以及其他课程材料和教学工具，以实现我们的教育目标。正在为本科电气，机械和微电子（MicroE）工程专业的学生开发一套风格连贯和教学一致的课程，内容包括明确的材料，主题和课程顺序。具体而言，课程和模块化MEMS课程结构集成MEMS到MEMS的基本概念的教学，从入门级开始，并进展到复杂MEMS的并行设计和制造的高级主题。该课程的讲座和实验室正在开发中，用于互动课堂环境，实施互动学习策略和课堂实践。正在设计一系列评估技术，以评估与传统的讲座为基础的课程相比的教学目标。对材料的等级测试和评价正在进行六个季度。除了MEMS的掌握，实验室和项目作业正在提高学生在沟通，团队合作和项目管理方面的能力，从而培养终身学习的技能。以学生为中心和指导的探索方法的有效性正在通过高级主题（抽象MEMS合成，CAD等）进行评估。并通过全面的实验室实验（制造、集成、封装和测试）。作为我们传播工作的一部分，开发并有效维护了一个互动网站，该网站概述了微机电系统课程，并允许免费下载所有课程材料。普渡大学，圣母大学和其他大学都表示有兴趣实施RIT MEMS课程。开发的课程正在评估由UM安阿伯，普渡大学和圣母院教师。该项目的更广泛的影响体现在先进的MEMS理论和工程实践中，这些理论和实践在教育中得到了推广，强调教学，培训，学习和奖学金。此外，妇女和少数民族通过多学科本科研究和教育广泛参与新的MEMS课程。最后，RIT的共享用户微系统设施的维护和增强对MEMS社区产生了影响。

Electrical Electrical (55)-This project is adapting and enhancing the course contents and accompanying laboratories of successful micro-electromechanical systems (MEMS) curricula developed at UM Ann Arbor and UC Berkeley. MEMS fundamentals and applications are being covered in a new introductory multidisciplinary "MEMS Design" course (with accompanying MEMS CAD Module Laboratories). This course is preparing students for a sequence of two courses - "MEMS Fabrication" and "MEMS System Evaluation"-with MEMS CAD and Fabrication Module Laboratories. These MEMS laboratories are being performed in the existing Rochester Institute of Technology (RIT) Microsystems Fabrication Facilities. The "MEMS Fabrication" and "MEMS System Evaluation" courses are adapted and enhanced versions of UM Ann Arbor "Introduction to MEMS" and "Integrated Microsystems Laboratory" courses. The resources to be adapted include class notes, various laboratory experiments, CAD tools, manuals, projects as well as other course materials and teaching tools to attain our educational objectives. A set of stylistically coherent and pedagogically consistent courses is being developed for undergraduate Electrical, Mechanical and Microelectronics (MicroE) engineering students in a well-defined material, topics and courses sequence. Specifically, the courses and modular MEMS curriculum structure integrate MEMS into the teaching of the basic concepts of MEMS, starting from an introductory level and progressing to advanced topics in concurrent design and fabrication of complex MEMS. The course lectures and laboratories are being developed for use in an interactive classroom environment, implementing interactive learning strategies and classroom practices. A series of evaluative techniques are being designed to assess pedagogical objectives compared with the traditional lecture-based courses. Class testing and evaluation of materials are being conducted over six quarters. In addition to the mastery of MEMS, the laboratory and project assignments are improving student competencies in communication, teamwork and project management, thereby developing skills for lifelong learning. The effectiveness of student-centered and guided exploration methods is being assessed through advanced topics (abstract MEMS synthesis, CAD, etc.) and through comprehensive laboratory experiments (fabrication, integration, packaging and testing). As a part of our dissemination efforts, an interactive web site summarizing the MEMS curriculum and allowing free downloading of all course materials is be developed and effectively maintained. Purdue University, Notre Dame and other universities have expressed interest in implementing the RIT MEMS curriculum. The developed curriculum is being evaluated by UM Ann Arbor, Purdue University and Notre Dame faculty. Broader Impacts of the project are demonstrated in the advance MEMS theory and engineering practice that are promoted in education emphasizing teaching, training, learning and scholarship. Also, there is broad participation of women and minorities in the new MEMS curriculum through multidisciplinary undergraduate research and education. Finally, the maintaining and enhancement of the shared user Microsystems Facilities at RIT provide an impact on the MEMS community.