SBIR Phase I: Novel Residual Gas Analyzer Development

这个小型企业创新研究(SBIR)第一阶段项目将开发一种基于新的离子源概念的全新类型的残余气体分析仪。新仪器的性能、成本和尺寸参数的组合将大大超过商业仪器。第一阶段的技术目标是：(1)设计和建造仪器概念的原理验证实验；(2)进行测试，以确定新仪器的基本性能；以及(3)为第二阶段的原型仪器进行初步设计。如果一期工程成功地在大质量范围内表现出高灵敏度，将为二期工程的进一步发展奠定坚实的基础。这项研究将为开发一种在成本、尺寸和性能方面比现有系统具有显著优势的新的残余气体分析仪提供基础。新仪器将降低半导体制造、真空镀膜、光电和化学加工等行业的资本和制造成本。它还将在研究和教育机构中广泛使用。

This Small Business Innovation Research (SBIR) Phase I project will develop a fundamentally new type of residual gas analyzer based on a novel ion source concept. The new instrument will have a combination of performance, cost and size parameters that greatly exceeds those of commercially available instruments. The technical objectives of Phase I are to: (1) design and construct a proof-of-principle experiment for the instrument concept; (2) conduct tests to characterize the basic performance of the new instrument; and (3) develop the preliminary design for a Phase II prototype instrument. If the Phase I project is successful in demonstrating high sensitivity over a wide mass range, it will provide a firm foundation for further development in Phase II. The research will provide the basis for the development of a new residual gas analyzer with substantial advantages in terms of cost, size and performance over existing systems. The new instrument will reduce capital and manufacturing costs in industries such as semiconductor manufacturing, vacuum coating, electro-optics, and chemical processing. It will also have widespread uses at research and educational institutions.