SBIR Phase I: Minature Radio Frequency/Micro-Electro-Mechanical Systems Absolute Pressure Transducer

这个小型企业创新研究（SBIR）第一阶段项目提出了一种全新的MEMS（微机电系统）压力传感器架构的开发，该架构能够提供灵敏度和动态范围的组合，远远超过最先进的技术。传感器结构被做得足够小和轻，能够在压力轰击的影响下以一种可以被相敏电子设备记录的方式移动。压差被消除，因此在换能器膜上没有净平均力，因此在输出中没有直流项。将使用一种纯电测量技术，利用薄膜移动时结构电容的变化。提出的检测方法是一种相位测量技术；具有很高的灵敏度和抗噪性。紧凑型压力传感器的全球市场超过25亿美元，从低成本的消费产品延伸到高端的科学和军事系统。对于所有的应用，低成本，小尺寸，尤其是低功耗是必不可少的。

This Small Business Innovation Research (SBIR) Phase I project proposes the development of an entirely new MEMS (Micro Electro-Mechanical Systems) pressure sensor architecture that is capable of providing a combination of sensitivity and dynamic range much beyond the state-of-the-art. The sensor structure is made small and light enough to be able to move under the influence of the pressure bombardment in a manner that can be recorded by phase sensitive electronics. The differential pressure is eliminated so that there is no net average force on the transducer membrane and hence no DC term in the output. A purely electrical measurement technique that exploits the change in the structure's capacitance as the membrane moves will be used. The proposed detection approach is a phase measurement technique; promising very high sensitivity and noise immunity. The worldwide market for compact pressure sensors is in excess of $2.5B and extends from low-cost consumer products to high-end scientific and military systems. For all applications, low-cost, small-size, and especially low power dissipation are essential.