PECASE: Research and Education Plans for Modeling and Design of Fixtures and Six-Axis Manipulators for Nanomanufacturing

该CAREER奖支持努力产生所需的知识，以创造低成本，高性能的机械手和夹具能够纳米级对齐。这项工作的学术价值包含在模型的生成和实验验证中，这些模型旨在预测以下性能：（1）单片纳米操纵器的3D顺应机制：PI将研究形成低成本，高性能六轴纳米操纵器的新工艺。 在这个过程中，成形和折叠用于将2D片材（模板）转换成3D顺应性机构。 该过程在一件内形成操纵器的结构和轴承。 将开发模型以将模板和3D机制的拓扑结构与Nanomanipulator对准性能联系起来。 (2)具有纳米级精度的可拆卸夹具：本研究旨在为纳米制造过程生成夹具技术。 PI将模拟硬涂层对夹具接触界面稳定性和可重复性的影响。 还将开发模型，以帮助合成夹具，通过集成的驱动和传感自动校正未对准。 如果这项工作取得成功，提高稳定性和误差校正的结合将使夹具具有纳米级的精度和可重复性。基于纳米制造技术的产品的成本和质量将受到操纵和夹具设备的成本和性能的影响。 目前的对准技术处于其实际的成本性能极限，因此对于下一代纳米制造工艺来说不是有吸引力的选择。 如果成功，这项研究将产生制造单片机床和超精密夹具所需的知识，这些机床和夹具非常适合提供低成本的纳米级对准。 这将使：（1）通过纳米制造工艺制造的产品或产品组件的成本降低和质量提高（2）研究人员更准确地表征纳米尺度器件和制造工艺。 更广泛的影响将通过与工业界建立联系（例如，福特，通用汽车）和教育工作，如创新的实践，发现为基础的学习和设计课程，并辅导代表性不足的少数民族。

This CAREER award supports efforts to generate the knowledge required to create low-cost, high-performance manipulators and fixtures capable of nanometer-level alignment. The scholarly merit of the work is contained in the generation and experimental validation of models which aim to predict the performance of: (1) 3D compliant mechanisms for monolithic Nanomanipulators: The PI will conduct research on a new process that forms low-cost, high-performance six-axis Nanomanipulators. In this process, forming and folding are used to transform a 2D sheet (template) into a 3D compliant mechanism. This process forms the structure and bearings of a manipulator within one piece. Models will be developed to link the topologies of the template and 3D mechanism to Nanomanipulator alignment performance. (2) Detachable fixtures with nanometer-level accuracy: This research aims to generate fixture technology for Nanomanufacturing processes. The PI will model the influence of hard coatings on the stability and repeatability of fixture contact interfaces. Models will also be developed to aid in the synthesis of fixtures which automatically correct misalignment via integrated actuation and sensing. If this work is successful, the combination of improved stability and error correction will enable fixtures with nanometer-level accuracy and repeatability.The cost and quality of products based on Nanomanufacturing technology will be influenced by the cost and performance of manipulation and fixturing equipment. Present alignment technologies are at their practical cost-performance limits and therefore not attractive options for next generation Nanomanufacturing processes. If successful, this research will generate the knowledge required to make monolithic machine tools and ultra-precision fixtures which are well-suited to provide low-cost, nanometer-level alignment. This will enable: (1) Reduced cost and improved quality of products or product components made via Nanomanufacturing processes (2) Researchers to more accurately characterize nano-scale devices and manufacturing processes. The broader impacts will be further enabled through established connections to industry (e.g., Ford, GM) and educational efforts such as innovative hands-on, discovery-based learning and design courses, and mentoring of underrepresented minorities.