MRI: Acquisition of a Multipurpose Plasma-Enhanced CVD Reactor for Nanostructure Fabrication

将获得最先进的多用途等离子体增强化学气相沉积（PECVD）反应器，该反应器将能够合成高度排列的纳米材料。该设备将构成纳米结构材料制造（NMF）设施的基础，以扩大波多黎各-马亚圭斯大学（UPRM）纳米科学和工程领域当前研究工作的范围。提议的NMF将成为UPRM新材料表征中心（MCC）的一部分，除了显著提高研究生产力外，还将提供新的基本功能。新仪器将使研究人员能够使用实验和建模工具从纳米材料的合成过程到其在创新应用中的使用，包括：(1)利用纳米管进行生物分子的电化学检测；(2)生产具有定制储氢性能的纳米管；(3)纳米管-聚合物基复合材料的结构和力学性能建模；(4)通过VLS机制合成纳米氮化物（晶须和导线）。综合工程部将使用该仪器来教育和培训在主要研究人员提供的本科研究课程中注册的本科生，以及为参与项目的研究生提供研讨会工具。它也将成为下个学期开设的新研究生课程的一部分。这台设备将是对upm现有材料科学与工程基础设施的宝贵补充，它将明显提高通用、机械、化学和电气工程以及化学和物理学系教员的研究和教育能力。这种多部门的兴趣将使NMF设施成为跨学科项目发展的环境。西班牙裔学生占工程专业学生的95%以上（其中40%为女性）。因此，NMF设施将对少数民族工程学生的教育产生重大影响。

A state-of-the-art multipurpose plasma-enhanced chemical vapor deposition (PECVD) reactor will be acquired that will enable the synthesis of highly aligned nanomaterials. This equipment will form the basis of a nanostructured materials fabrication (NMF) facility to expand the scope of current research efforts in nanoscience and engineering at University of Puerto Rico - Mayaguez (UPRM). The proposed NMF will be part of the new Materials Characterization Center (MCC) at UPRM and will provide new and essential capabilities, in addition to dramatically increasing research productivity. The new instrument will give researchers the capability to study nanomaterials from their synthesis process using experimental and modeling tools to their use in innovative applications, including: (1) the use of nanotubes for the electrochemical detection of biomolecules, (2) production of nanotubes with tailored properties for hydrogen storage, (3) modeling of nanotubes-polymer matrix composites structural and mechanical properties, and (4) the synthesis of nanonitrides (whiskers and wires) via the VLS mechanisms.The General Engineering Department will use this instrument in the education and training of undergraduate students registered in the undergraduate research courses offered by the principal investigators, as well as a workshop tool for the graduate students involved in the projects. It will also become part of the new graduate courses being offered in coming semesters. This equipment will be a valuable addition to the existing Materials Science & Engineering infrastructure at UPRM and it will clearly improve the research and education capabilities of faculty members in the departments of General, Mechanical, Chemical and Electrical Engineering and of Chemistry and Physics. This multi-departmental interest will turn the NMF facility into a setting for the development of interdisciplinary projects. Hispanic students constitute over 95% of the Engineering students at UPRM (40% of them female). Therefore, the NMF facility will have a significant impact on the education of minority engineering students.