MRI: Acquisition of a Tunable Infrared Laser and Chamber for the Deposition and Characterization of Thin Films of Ceramics, Oxides and Polymers

该主要研究仪器/本科院校研究（MRI/RUI）奖为购买高功率可调谐红外激光器，高功率紫外激光器和脉冲激光沉积真空室组件提供资金。与该机构现有的表征设备一起，该设备将用于材料的先进激光加工研究和聚合物、陶瓷和氧化物的薄膜沉积。激光用于蒸发真空室内的目标材料，然后将其作为薄膜沉积在衬底上。真空室具有多种特征和能力，包括目标的旋转和多目标旋转盘，将使复合材料和/或多层薄膜的沉积成为可能。薄膜可以沉积在惰性或反应性背景气体中，基材可以加热或冷却。此外，还包括一个光学列车，允许激光束光栅穿过目标。包括激光器在内，整个系统由计算机控制，并可根据多个用户需求进行配置。这些仪器将用于研究和教育，特别侧重于物理、化学和生物专业的本科生。由这些仪器支持的研究将导致对允许薄膜沉积的激光-材料相互作用的更深层次的理解。它将为来自各个科学部门的学生提供独特的研究机会，从而促进多学科研究活动。这些仪器将有利于正在进行的研究项目，并将为这些项目提供一个共同的参考点。这些仪器还将支持与现有课程直接重叠的研究，并加强课堂和实验室学习。最后，利用这些仪器沉积的薄膜将在微电子、化学和生物传感等多种应用领域具有重要意义。

This Major Research Instrumentation/Research in Undergraduate Institution (MRI/RUI) award provides funds for the acquisition of a high power tunable infrared laser, a high power ultraviolet laser, and a pulsed laser deposition vacuum chamber assembly. Together with the institution's existing characterization equipment, this equipment will be used for advanced laser processing of materials research and thin film deposition of polymers, ceramics, and oxides. The lasers are used to evaporate target materials inside the vacuum chamber, which are then deposited upon substrates as thin films. The vacuum chamber has a variety of features and capabilities that include rotation of the target and a multi-target carousel that will enable the deposition of composite and/or multi-layer films. Thin films may be deposited in either an inert or reactive background gas and the substrate may be either heated or cooled. In addition an optical train is included that allows the laser beam to be rastered across the target. Including the lasers, the entire system is then computer controlled and may be configured for multiple user requirements. The instruments will be used for both research and education with particular emphasis on undergraduate students from physics, chemistry and biology.The research that is supported by these instruments will lead to a deeper understanding of the laser-material interaction that allows the deposition of thin films. It will provide unique research opportunities for students from across the science departments, thus fostering multidisciplinary research initiatives. The instruments will be of benefit to ongoing research programs and will provide a common reference point for these programs. The instruments will also support research that directly overlaps with existing curricula and reinforces classroom and laboratory learning. Finally, thin films deposited using these instruments will have importance to diverse application areas such as microelectronics and chemical and biological sensing.