U.S.-India Cooperative Research: Development of Metal Oxide Silicon/ Porous Silicon MEMS Sensor and Signal Processing Unit for Atmospheric Monitoring in Underground Coalmines

0422782 Ghosh描述：该奖项支持美印合作研究，题为“开发用于煤矿井下大气监测的金属氧化物硅/多孔硅MEMS传感器和信号处理单元”。 这是一项探索性研究，旨在解决现有矿井气体传感器的局限性，将通过锡拉丘兹大学的Prasanta Ghosh教授和印度加尔各答Japavpur大学的Hiranmay Saha教授之间的一系列互访进行。 PI将合作开发具有氧化锌沉积的设备，用于感测地下煤矿中所需的有毒气体。 此外，他们将检测气体的水平，并处理信号适合向前传输到位于地面的控制室。 适用范围：合作者将利用Ghosh教授在薄膜沉积和OTA电路开发领域的优势，以及Saha教授在多孔硅和硅/多孔硅MEMS传感器领域的优势。 他们希望他们的研究能够产生广泛的影响，因为它将导致开发出适用于地下煤矿的相对便宜和可靠的大气监测系统。 它还将丰富MEMS领域的基础知识，并将导致用于气体和压力传感的集成硅微传感器的发展。 研究生和本科生在这两个机构将受益于研究人员在交流访问期间给出的演示文稿。 研究结果将在期刊和会议上广泛传播，他们将在会上介绍研究结果。

0422782Ghosh Description: This award supports the US-India cooperative research entitled Development of Metal Oxide Silicon/Porus Silicon MEMS Sensor and Signal Processing Unit for Atmospheric Monitoring in Underground Coalmines. This is an exploratory study to address the limitations of existing mine gas sensors that will be conducted through a series of exchange visits between Professors Prasanta Ghosh, Syracuse University and Hiranmay Saha, Japavpur University, Kolkata, India. The PIs will collaborate in developing devices with the deposition of Zinc Oxide for sensing the desired toxic gases in underground coalmines. Additionally, they will detect the level of the gas and process the signal suitabity for onward transmission to the control room located at the surface. Scope: The collaborators will employ the complimentary strengths of Professor Ghosh in the area of thin film deposition and development of OTA based circuits with that of Professor Saha in the field of Porous Silicon and Silicon/Porous Silicon based MEMS Sensors. They expect their research to have broad impact in that it will lead to the development of relatively cheap and reliable atmospheric monitoring systems suitable for underground coalmines. It will also enrich fundamental knowledge in the field of MEMS and will lead to the development of Integrated Silicon Microsensors for gas and pressure sensing. Graduate and undergraduate students at both institutions will profit from presentations given by the researchers during exchange visits. The results will be disseminated broadly in journals and at conferences where they will present the research findings.