Collaborative Research: Micro- Lenses for Manufacturing

本研究的目的是为可调谐微透镜阵列奠定科学基础，并探索其在高通量生产中的应用。这个小组最近展示了可调谐的毫米大小的毛细管透镜，其分辨率接近最大理论极限。这些毛细管透镜的独特之处在于，它们的调整不涉及接触线的移动，接触线是流体（构成透镜的液体及其周围的气体）与固体相遇的地方；避免接触线移动，因为它是摩擦的来源。该项目将解决两个关键问题：i)快速响应时间和ii)小规模包装。应对第一个挑战的方法是分析通过机械（压电致动器获得的压力）和电气（电动）手段触发的毛细透镜的形状变化。为了解决第二个挑战，现有的微加工技术将被改编并开发用于制造毛细管微透镜阵列的新技术。例如，可能必须开发一种新技术，将多孔介质嵌入玻璃芯片的中间以实现电动驱动。微透镜阵列将在几十到几百微米的尺度上进行研究。这项研究最终将使一种技术成为可能，当基板在阵列下方扫描时，通过连续调整每个微透镜的焦距来精确控制最小特征尺寸。该项目预计将影响技术发展，因为毛细管微透镜可用于操纵光线，从而实现小规模设备的大批量生产（制造）。具体来说，实现单独可调的微透镜阵列可以导致动态光刻，例如可以用于曲面。这是通往具有亚微米特征的三维图形能力的门户。此外，多学科的高级团队有望为培养研究生和本科生提供独特的研究机会。

The objective of this research is to develop the science base for tunable micro-lens arrays and explore their application for high throughput production. Tunable, millimeter-sized capillary lenses have recently been demonstrated by this group, with resolution approaching the maximum theoretical limit. The unique feature of these capillary lenses is that their tuning does not involve the movement of the contact line, where the fluids (the liquid that constitutes the lens and the gas surrounding it) meet the solid; contact line movement is avoided since it is a source of friction. The project will address two key issues: i) fast-response time and ii) small-scale packaging. The approach to meet the first challenge is to analyze shape changes in capillary lenses triggered via mechanical (pressure obtained by piezoelectric actuator) and electrical (electrokinetic) means. To address the second challenge, existing microfabrication techniques will be adapted and new ones developed for manufacturing capillary micro-lens arrays. For example, a novel technique may have to be developed to embed a porous medium in the middle of a glass chip for electrokinetic actuation. Micro-lens arrays will be studied at scales ranging from tens to hundreds of microns. The proposed research will ultimately make possible a technology to accurately control the minimum feature size by continuously adjusting the focal length of each micro-lens while the substrate is scanned underneath the array.This project is expected to impact technological development, since capillary micro-lenses can be used to manipulate light, enabling high volume production (manufacturing) of small scale devices. Specifically, realization of an individually tunable micro-lens array can lead to dynamic photolithography, which can be used for example on curved surfaces. This is a gateway to 3-dimensional patterning capability with sub-micrometer features. Furthermore, the multidisciplinary senior team is expected to provide a unique research opportunity for educating graduate and undergraduate students.