NER: Embedding nanoparticles in silicon crystals for efficient light emission

本研究的目的是探索er2o3类和贵金属（如Ag或Au）纳米颗粒在晶体硅中的形成及其对Er离子1.54 um发光的影响。PI将建立各种材料加工（包括离子注入和热退火）所得Si结构的结构和光学性质之间的相关性。该方法基于一个有趣的现象，即在氢或氦离子注入的Si中产生纳米尺寸的空洞/空腔，以及这些空腔与杂质的强相互作用，并且与当前的半导体制造/加工技术完全兼容。如果成功，这项研究将导致硅基光子学和光电子学的发展取得突破，对半导体行业产生重大影响，半导体行业正在努力寻求创新的解决方案，以继续获得指数级的成本/性能收益。这项研究将促进新材料和纳米结构制造方面的知识，并将为学生提供纳米科学和技术方面的先进研究和学习经验。此外，建议的研究将有助于PI开发基于研究的课程，以有效地教授研究生和本科水平的物理课程。

The objective of this research is to explore the formation of Er2O3-like and noble-metal (e.g., Ag or Au) nanoparticles in crystalline silicon as well as their effects on the 1.54-um luminescence of Er ions. The PI will establish correlation between the structural and optical properties of resultant Si structures for various materials processing including ion implantation and thermal annealing. The approach is based on an interesting phenomenon associated with the generation of nanometer-sized voids/cavities in hydrogen or helium ion implanted Si and the strong interaction of such cavities with impurities, and is completely compatible with current semiconductor fabricating/processing technologies. If successful, this research would lead to breakthroughs in the development of Si-based photonics and optoelectronics, having great impacts on the semiconductor industry that is striving for innovative solutions to continue the exponential gain in cost/performance benefits. The research will advance knowledge in novel materials and nanostructure fabrication, and will provide students with advanced research and learning experience in nanoscale science and technology. Furthermore, the proposed research will help the PI develop research-based curricula for effective teaching of graduate- and undergraduate-level physics courses.