Acoustic wave gas sensors for ultra-high temperature environments

摘要：0510530pi: Wang Qing-Ming和chminking Chyu（University of pittsburgh）。本项目研究了langasite （La3Ga5SiO14）声波传感器在高温气体传感中的应用。本研究的具体目标包括：1)langasite高温谐振器的基础研究，包括谐振器的设计、制造、机电特性和频率-温度依赖性的表征；2)利用金属氧化物传感层的langasite基高温声波谐振器开发用于O2和NOx气体原位实时检测的高温气体传感器。声波传感器将采用Ga2O3和WO3两种气敏薄膜材料作为气敏层。本研究的最终目标是开发一种快速、简单、廉价、可靠的基于谐振器传感器的仪器，用于检测和监测O2和NOx气体。该项目还旨在通过促进研究转移到课堂，同时为来自代表性不足群体的本科生提供研究经验机会，增加学生对机械工程系内外正在进行的研究的参与。研究成果也被纳入现有的研究生水平传感器技术课程。这是一个由传感器倡议NSF 05-526支持的项目。

Abstract 0510530PIs: Qing-Ming Wang and Minking Chyu(University of Pittsburg)This project investigates the use of langasite (La3Ga5SiO14) acoustic wave sensors for high temperature gas sensing applications. The specific objectives in this research include: 1) fundamental study of langasite high temperature resonators, including resonator design, fabrication, and characterization of electromechanical properties and frequency-temperature dependence; and 2) development of high temperature gas sensors for in-situ and real time detection of O2 and NOx gases using langasite based high temperature acoustic wave resonators with metal oxide sensing layers. Two type of gas sensing thin film materials, namely Ga2O3 and WO3 will be employed as gas sensitive layers in the acoustic wave sensors. The ultimate goal of this research is to develop a fast, simple, inexpensive, and reliable resonator sensor-based instrument for detecting and monitoring O2 and NOx gases. The project also aims to increase student involvement in the ongoing research, within and outside the Mechanical Engineering Department, by promoting research transfer into classrooms, and simultaneously providing research experience opportunities for undergraduate students from underrepresented groups. Materials outcome from the research are also incorporated into an existing graduate level sensor technology course.This is a project supported under the Sensor Initiative NSF 05-526.