SBIR Phase I: Nanostructured Materials and Process for Improved Electrochromic Device Performance

这个小企业创新研究（SBIR）第一阶段项目研究了一种新的加工技术，用于沉积二元纳米复合金属氧化物薄膜，以生产具有卓越性能和可靠性的电致变色（EC）器件。EC技术被用于制造智能窗户，这种窗户可以通过电子着色来控制太阳能的光和热。设计的材料成分和纳米结构将使EC器件的关键层具有最大的断裂韧性和最小的双轴应力。更坚固的薄膜有望提高智能窗户产品的可靠性，这些产品暴露在各种环境和太阳能条件下，同时在其预期寿命内被切换数万次。纳米技术创新还将导致大型（1.5米）EC窗口的更快切换，并在透明状态下实现更高的透光率，在着色状态下实现更好的颜色中性。技术目标是探索溅射沉积和热退火在EC薄膜中产生稳定的纳米复合材料。设计的实验将探索由此产生的有益的机械和光学薄膜性能。最后，将对实验室规模的纳米结构薄膜器件的EC性能进行评估。预计全球节能EC建筑窗市场成熟时的年销售额将达到138亿美元。该项目的性能和可靠性改进对于广泛的市场接受是至关重要的。OEM窗口公司，建筑师和建筑居住者需要更大的窗口和改进的透射性能，可以通过纳米结构材料获得。此外，增加的薄膜韧性将导致更高的产量，在制造过程中伴随着更低的成本。除了建筑窗户外，纳米结构薄膜的沉积技术还可以改善平板显示器的性能，并为先进的CMOS技术提供替代栅氧化物。

This Small Business Innovation Research (SBIR) Phase I project addresses a novel processing technique for depositing binary nanocomposite metal oxide thin films to yield electrochromic (EC) devices with superior performance and reliability. EC technology is used to fabricate smart windows that can be electronically tinted to control solar light and heat. Materials with designed composition and nanostructure will enable maximum fracture toughness and minimal biaxial stress of key layers in EC devices. The more robust films are expected to boost the reliability of smart window products which are exposed to a wide range of environmental and solar conditions while being switched tens of thousands of times over their expected lifetime. The nanotechnology innovation will also result in faster switching of large (1.5m) EC windows and enable higher light transmission in the clear state with better color neutrality in the tinted state. The technical objective is to explore sputter deposition and thermal annealing to yield stable nanocomposites in EC thin films. Designed experiments will explore resulting beneficial mechanical and optical film properties. Finally, the EC performance of lab scale devices incorporating nanostructured films will be evaluated.The global market for energy saving EC architectural windows is predicted to be $13.8 billion in annual sales at maturity. The performance and reliability improvements achievable as a result of this project are essential for widespread market acceptance. OEM window companies, architects, and building occupants require the larger windows and improved transmission properties obtainable with nanostructured materials. In addition, the increased film toughness will lead to higher yields during manufacturing with concomitant lower costs. In addition to architectural windows, deposition technologies for nanostructured films can improve the performance of flat panel displays and alternative gate oxides for advanced CMOS technology.