NIRT: GOALI - An Electron-Beam Based Microscale Nano-Manufacturing Platform with 1-nm Accuracy

该提案是响应纳米科学和工程倡议，NSF 05-610，类别NIRT。 纳米级跨学科研究团队将解决纳米级制造面临的关键挑战之一：需要以成本效益的方式大规模生产具有纳米级精度和可重复性的有源纳米系统。 这项工作整合了基础和应用研究，为微机电系统奠定了基础，该系统以纳米精度和精度执行基于电子束的纳米制造。 该团队是根据NSF的“与工业界学术联系的赠款机会”（GOALI）机制组建的，包括肯塔基州大学、马萨诸塞州理工学院和Novelx公司，一家成立四年的初创公司 拟议研究的智力价值在于（1）解决纳米级制造中的基本准确性问题，（2）深入了解电子与纳米结构材料的相互作用，以及（3）评估纳米图案精度和可重复性的限制。 该项目集成了两个关键创新：基于原位基准网格的电子束位置反馈控制和使用微机电电子光学系统进行纳米图案化。 研究工作将最终与集成这些发展在一个微尺度的纳米制造系统。这一努力将通过提供一个低成本的路线，纳米精确的制造平台，提高纳米制造基础设施。 为了确保该项目产生更广泛的影响，该团队正在与肯塔基州大学的纳米工程证书课程（NECP）合作开展本科教育工作。 该小组还发起了针对来自代表性不足的阿巴拉契亚地区的高中生的多样性增强外联工作。 最后，这个正式的研究和教育计划，麻省理工和Novelx，Inc.将有助于在纳米级制造相关学科的训练有素的劳动力。

This proposal was received in response to Nanoscale Science and Engineering initiative, NSF 05-610, category NIRT. The Nanoscale Interdisciplinary Research Team will address one of the critical challenges facing nanoscale manufacturing: the need to cost-effectively mass produce active nano-systems with nanometer-level accuracy and repeatability. This effort integrates fundamental and applied research to lay the foundation for micro-electromechanical systems that perform electron-beam based nano-manufacturing with one nanometer accuracy and precision. The team, assembled under NSF's Grant Opportunities for Academic Liaisons with Industry (GOALI) mechanism, encompasses the University of Kentucky, the Massachusetts Institute of Technology, and Novelx, Inc., a four-year old start-up company. The intellectual merit of the proposed research rests on (1) addressing the fundamental problem of accuracy in nanoscale manufacturing, (2) gaining insight into electron interactions with nanostructured materials, and (3) assessing the limits of nanopatterning accuracy and repeatability. The project integrates two key innovations: feedback control of electron-beam position based on an in-situ fiducial grid and use of micro-electromechanical electron-optical systems for nanopatterning. The research effort will culminate with the integration these developments in a microscale nano-manufacturing system.This effort will enhance nanofabrication infrastructure by providing a route to a low-cost, nano-accurate manufacturing platform. To ensure even broader impact of the project, the team is embarking on an undergraduate education effort in connection with the University of Kentucky's Nanoscale Engineering Certificate Program (NECP). The team has also initiated diversity enhancing outreach efforts targeting high-school students from underrepresented Appalachian regions. Finally, this formalized research and education program between U.K., M.I.T., and Novelx, Inc. will contribute to the trained workforce in nanoscale manufacturing related disciplines.