MRI: Acquisition of an Optical Profiler for Surface Characterization and Dynamic Analysis of MEMS Devices

本研究旨在探讨薄膜微结构元件之机械性质与表面特性。 NSF的资金申请用于购买光学轮廓仪，用于MEMS器件的表面表征和动态分析。 该方法是加强研究活动和教育计划在RIT在MEMS和微系统与光学轮廓仪系统的测量能力。 将得到支持的智力MeritResearch领域侧重于在微米和纳米尺度上分析材料特性和设备（即涂层，隔膜，致动器）。 光学轮廓仪系统提供了SEM、AFM和机械触针轮廓测量的替代方案，所有这些都是破坏性的，并且非常适合定义项目区域的计量需求。 通过能够在没有物理接触的情况下测量这些特性，能够以更高的精度不受干扰地测量表面拓扑结构以及垂直和横向位移。 DMEMS选项允许在高达1 MHz的频率下研究和量化MEMS器件的动态操作（即偏转，变形，振动模式，旋转）;对于大多数MEMS器件应用来说足够了。更广泛的影响各种科学，技术，工程和其他学科的本科生和研究生将使用该仪器进行研究和发现。 本科生研究经验（REU）提案将与一些NSF支持的项目一起提交，这些项目将利用光学轮廓仪;这些提案将专门针对代表性不足的群体和妇女。 测量视频演示是K-12推广活动的理想选择，鼓励技术职业的探索。

The objective of this research is to investigate the mechanical properties and surface characteristics of thin-film microstructure devices. NSF funding is requested for the acquisition of an Optical Profiler for surface characterization and dynamic analysis of MEMS devices. The approach is to enhance the research activity and education initiatives at RIT in MEMS and Microsystems with the measurement capabilities of the Optical Profiler system. Intellectual MeritResearch areas that will be supported focus on the analysis of material properties and devices (i.e. coatings, diaphragms, actuators) at the micro-and nano-scale. The Optical Profiler system provides an alternative to SEM, AFM, and mechanical stylus profilometry, all which are destructive, and is uniquely suited for the metrology needs in the defined project areas. Unperturbed measurements of surface topology and vertical and lateral displacements with increased precision are enabled through the ability to measure these properties without physical contact. The DMEMS option allows the dynamic operation of MEMS devices (i.e. deflection, deformation, vibration modes, rotation) to be studied and quantified at frequencies up to 1MHz; ample for most MEMS device applications.Broader ImpactsA variety of undergraduate and graduate students majoring in science, technology, engineering, and other disciplines will use this instrument for research and discovery. Research Experience for Undergraduates (REU) proposals will be submitted in connection with a number of NSF supported projects that will utilize the Optical Profiler; these proposals will specifically target underrepresented groups and women. Measurement video presentation is ideal for K-12 outreach activities encouraging the exploration of technical careers.