MRI: Acquisition of a comprehensive plasma diagnostic system for research and education

号提案 CTS-0619851主要研究者： M. Gordon，阿肯色大学MRI：收购用于研究和教育的综合等离子体诊断系统 这项主要研究仪器拨款将获得三个最先进的等离子体诊断系统-光学发射光谱，残余气体分析和朗缪尔探针-以定量和空间测量：中性和带电原子和分子基态和激发态数密度和能量;和低压等离子体中的电子数密度和能量。此次收购将立即显著提高以下三个当前和创新的材料和器件相关研究项目的进展：（1）开发一种在新型倒置圆柱形磁控溅射系统中生长低温结晶α相氧化铝薄膜的方法，该方法需要在关键衬底和靶位置处进行空间和时间分辨的电子和离子密度以及能量测量，（2）为了在硅中产生对于航空电子系统中使用的致密、高性能、三维电子封装至关重要的合适的通孔，需要在两个反应离子蚀刻系统中进行等离子体表征，以及（3）为了实现垂直排列的碳纳米管的巨大潜力，用DNA官能化用于生物传感器应用，需要理解离子浓度和能量的作用，生长物质的确定，以及理解空间测量所提供的电子密度和能量的影响。所有三个基于等离子体的项目的工作都在进行中，但使用所要求的等离子体诊断设备可以大大提高生产率和基本了解。 此次设备收购所进行的调查将有助于正在进行的本科生和研究生研究，并改善现有的本科生和研究生水平的教学，通过研究项目和课程直接影响近100名本科生和研究生。这项研究对行业和社会的影响也很重要，因为每个项目都提供了高价值的产品。拟议的项目还将为许多高中学生和教师以及本科生和研究生创造重要的教育机会，这些学生已经并将继续通过研究和课程与阿肯色州大学的教师互动。PI将继续积极招募代表性不足的本科生和研究生，并扩大他目前的活动，让更多的少数民族和女性K-12学生和教师参与进来。

Proposal No. CTS-0619851Principal Investigator: M. Gordon, University of ArkansasMRI: Acquisition of a comprehensive plasma diagnostic system for research and education This Major Research Instrumentation grant is to acquire three state-of-the-art plasma diagnostic systems - optical emission spectroscopy, residual gas analysis, and Langmuir probe - to measure quantitatively and spatially: neutral and charged atomic and molecular ground and excited state number densities and energy; and electron number density and energy in low pressure plasmas. This acquisition will immediately and significantly enhance the progress of the following three current and innovative material- and device-related research projects: (1) develop a process for growing low temperature crystalline alpha-phase alumina thin films in a novel inverted cylindrical magnetron sputtering system requires spatially and time-resolved electron and ion density and energy measurements at the critical substrate and target locations, (2) to produce suitable vias in silicon crucial for dense, high performance, three-dimensional electronic packages used in avionic systems requires plasma characterization in two reactive ion etch systems, and (3) to realize the enormous potential of vertically aligned carbon nanotubes, functionalized with DNA for bio-sensor applications, requires understanding the role of ion concentration and energy, determination of growth species, and understanding the effects of electron density and energy that spatial measurements would provide. Work on all three plasma-based projects is on-going, but significantly enhanced productivity and fundamental understanding is possible using the requested plasma diagnostic equipment. The investigations enabled by this equipment acquisition will aid on-going undergraduate and graduate research and improve existing undergraduate and graduate level teaching, directly affecting nearly 100 undergraduate and graduate students through research projects and courses. The impact of this research on industry and society is also significant because each project offers a high-value product. The proposed projects will also generate significant educational opportunities for the many high school students and teachers, and undergraduate and graduate students that have interacted, and will continue to interact, with faculty at the University of Arkansas through research and classes. The PI will continue to actively recruit underrepresented undergraduate and graduate students, and expand his current activities to involve more minority and female K-12 students and teachers.