STTR Phase I: A Lithographic Gelcasting Process using Nanoparticulates: An Enabling Technology for Mass Production of Microdevices with Nanoscale Features

这个小企业技术转让（STTR）第一阶段项目旨在开发从金属和陶瓷纳米级颗粒阵列制造复杂3D微器件的技术。 在一种新的光刻凝胶注模（LGC）工艺中，多层模具将使用半导体工业中使用的标准光刻技术制成，每个模具层都用纳米级颗粒材料浇铸。 然后将所得多层部件烧结以将颗粒熔合成致密固体。 这项创新将扩大现有的微型制造工艺套件，允许用更广泛的材料制造更复杂的零件。 这项研究的广泛影响将是制造显微手术器械，以实现下一代微创手术。在NSF STTR资助下开发的技术将通过商业化转移到工业中。 该技术还可能在需要陶瓷和金属微型器件的广泛行业中产生深远的影响。例如，所有提出的微机械系统，如微型空中和陆地车辆，微型机器人和微型监视系统，必须由坚固的微型组件组装而成，这些组件可以承受宏观对应物的环境，应力和疲劳寿命。

This Small Business Technology Transfer (STTR) Phase I project aims to develop the technology for the manufacture of complex 3-D micro-devices from an array of metal and ceramic nanometer-scale particulates. In a novel lithographic gelcasting (LGC) process, multilayer molds will be made using standard photolithography techniques used in the semiconductor industry, and each mold layer cast with nanometer-scale particulate materials. The resulting multilayer parts will then be sintered to fuse the particles into a dense solid. The innovation will expand the suite of available micro-manufacturing processes, allowing more complex parts to be made from a much wider variety of materials. The broad impact of this research will be the manufacture of micro-surgical instruments to enable the next generation of minimally invasive surgical procedures. The technology developed under the NSF STTR funding will be transferred to industry via commercialization. The technology could also have profound implications in a wide range of industries where ceramic and metal microscale devices are needed. For example, all the micro-mechanical systems being proposed such as micro air and land vehicles, micro robots, and micro surveillance system must be assembled from robust micro-components that can withstand the environments, stresses, and fatigue lives of their macroscopic counterparts.