SBIR Phase I: Design and Fabrication of a Novel Electrostatic Micro Energy Harvester

这项小型企业创新研究（SBIR）第一阶段研究项目旨在研究制造一种基于振动的硅静电微能量收集器的可行性，该收集器具有高实际可实现功率密度（AAPD），用于为无线传感器网络节点供电。本研究提出了一种通过增加能量采集器的AAPD来提高转换功率的新途径。本研究的创新点包括一种新的静电收割机设计和一种新的设计工艺。主要的技术目标是证明所建议的设计是否确实可以用所建议的工艺制造。具体的研究活动包括收割机设计和微加工工艺集成与优化。如果电源的使用寿命、体积和可更换性受到限制，电池并不总是理想的选择。从环境中收集能量为微电子设备供电已成为另一种解决方案。由于能量采集器产生的功率在微到毫瓦范围内，因此尽可能多地输出电能是能量采集器发展的首要目标。所提出的能量采集器的主要应用是无线传感器网络。目前，无线传感器网络商业化的最大技术挑战之一是提供一个具有成本效益的电源解决方案。能量收集器非常有吸引力，因为它们可以提供长寿命的电力；降低安装和维护成本；并启用完全自供电的无线和无电池传感器节点。

This Small Business Innovation Research (SBIR) Phase I research project proposes to investigate the feasibility of making a vibration-based silicon electrostatic micro energy harvester with a high Actual Achievable Power Density (AAPD) for powering wireless sensor network nodes. This research proposes a new route to increase converted power by increasing the AAPD of an energy harvester. The innovation of this research includes a novel electrostatic harvester design and a novel process for making this design. The primary technical objective is to demonstrate if the proposed design can indeed be fabricated with the proposed process. The specific research activities include harvester design and microfabrication process integration and optimization. Batteries are not always an ideal choice if the lifetime, volume and replacement accessibility of a power source are restricted. Harvesting energy from the environment to power microelectronics devices has become an alternative solution. As energy harvesters produce power in the microW to mW range, outputting electric energy as much as possible is the primary goal of energy harvester development. The principal application of the proposed energy harvester is for wireless sensor networks (WSN). Currently, one of the biggest technical challenges for the commercialization of WSN is to provide a cost-effective power solution. Energy harvesters are highly attractive as they can supply long-lived power; reduce the cost of installation and maintenance; and enable completely self-powered wireless and battery-free sensor nodes.