SBIR Phase I: High-Power Microwave Tuner/Reconfigurable Matching

这个小型企业创新研究（SBIR）第一阶段项目旨在展示一种能够处理高功率RF/微波信号的新型射频调谐器/可重构匹配网络（T/RN）。电子T/RN在通信电路和系统的设计和开发中有许多应用。虽然采用RF MEMS开关或变容二极管的当前T/RN的性能令人印象深刻，但这主要是在相对低功率的信号电平（例如，1/2瓦），这是由于在高功率水平下操作时开关或变容二极管中的自致动的开始。因此，需要基于RF MEMS的调谐器/可重新配置的匹配网络，其即使在处理高功率信号时也可以保持由该技术实现的高水平性能。该研究有三个主要目标：1）设计一种新型的高功率RF MEMS T/RN; 2）证明其低成本可制造性; 3）证明其高功率性能。该研究将解决与T/RN架构相关的关键技术挑战，以最大限度地提高其寿命和功率处理能力。这项研究的成功成果将为高端系统提供新的功能，如航空航天和国防系统、无线基础设施和仪器仪表。它的潜在商业价值在于数千万美元。这项研究的科学影响将是多产的。在得克萨斯州A M大学（TAMU）的研究将被整合到两个本科课程，“MEEN 461：传热”和“MEEN 404：工程实验室”，以及新的入门研究生/高级本科水平课程“ME 489：介绍MEMS，微流体和纳米技术。“此外，拟议的研究计划和产品开发工作将促进多物理计算建模，材料表征和薄膜热传输机制的研究。

This Small Business Innovation Research (SBIR) Phase I project aims at demonstrating a novel radio-frequency tuner/reconfigurable matching network (T/RN) capable of handling high-power RF/microwave signals. Electronically T/RNs find many applications in the design and development of communications circuits and systems. While the performance of current T/RNs employing RF MEMS switches or varactors is impressive, this has been mostly demonstrated at relatively low-power signal levels (e.g., sub-Watt) due to the onset of self-actuation in the switches or varactors when operating at high power levels. There is a need, therefore, for RF MEMS-based tuners/reconfigurable matching networks that can maintain the high levels of performance enabled by this technology even when handling high-power signals. The proposed research has three primary objectives: 1) to design a novel high-power RF MEMS-based T/RN; 2) to demonstrate its low-cost manufacturability; and 3) to demonstrate its high-power performance. The research will address key technical challenges related to T/RN architecture to maximize its life and power-handling capability. The successful outcome of this research will enable new capabilities in high-end systems, such as aerospace and defense systems, wireless infrastructure, and instrumentation. Its potential commercial value lies in the tens of millions of dollars. The scientific impact of the research will be prolific. The research at Texas A&M University (TAMU) will be integrated into two undergraduate courses, "MEEN 461: Heat Transfer" and "MEEN 404: Engineering Laboratory," and the new introductory-graduate/senior-undergraduate level course "ME489: Introduction to MEMS, Microfluidics and Nanotechnology." Furthermore, the proposed research program and product development efforts will foster multi-physics computational modeling, materials characterization and investigation of thermal transport mechanisms in thin films.