CAREER: Experimental Investigation of Mechanical Properties of Nanoporous Thin Films

这项教师早期发展（CAREER）计划资助了一项综合研究和教育计划的发展，以调查纳米多孔薄膜的微观结构和机械性能。采用纳米压痕、激光诱导表面声波（LiSAW）、激光诱导薄膜散裂（LiTFS）和基于超声全息的数字图像相关（UHDIC）等综合多尺度实验方法来确定纳米多孔薄膜的微观结构-力学性能关系。重点研究孔隙率、孔隙结构、结晶度等因素对纳米孔薄膜体积、表面和界面性能的影响，以及在不同载荷条件下纳米孔薄膜的变形、分层、损伤和致密化机制。由于纳米孔分子筛薄膜具有有序的孔隙结构、晶体结构和在纳米孔材料市场中的主导地位，因此纳米孔分子筛薄膜将成为本研究的最初重点，而基础知识和已建立的技术将可转移到许多其他有序和非有序的纳米孔材料中。如果成功，本研究结果将导致：1)提高对纳米多孔薄膜工艺-微观结构-力学性能关系的科学理解；2)一套创新的实验工具，可用于研究各种纳米多孔材料；3)促进纳米多孔薄膜在微电子、能源材料、薄膜和涂料等广泛领域的加工和应用；4)更多未被充分代表的本科生、女性和少数民族参与科学和工程；5)为当地高中学生和教师提供更多的拓展机会，特别是那些经济或教育上处于不利地位的学生；6)加州大学河滨分校为欠发达地区的南加州内陆帝国提供更大、更多样化的科技劳动力。

This Faculty Early Development (CAREER) Program grant provides funding for the development of an integrated research and education program to investigate the microstructural and mechanical properties of nanoporous thin films. The integrated, multiscale experimental approach including nanoindentation, laser-induced surface acoustic waves (LiSAW), laser-induced thin film spallation (LiTFS), and ultrasonic holography based digital image correlation (UHDIC) will be used to determine the microstructure-mechanical property relationship of nanoporous thin films. In particular, the study will focus on the effect of porosity, pore structure, and crystallinity etc on the bulk, surface and interface properties of nanoporous thin films, and their deformation, delamination, damage and densification mechanisms under various loading conditions. Due to their ordered pore structure, crystalline framework and dominating role in nanoporous materials market, nanoporous zeolite thin films will be the initial focus of this research while the fundamental knowledge and the established techniques will be transferable to many other ordered and non-ordered nanoporous materials. If successful, the results of this research will lead to: 1) improved science-based understanding of the process-microstructure-mechanical property relationship of nanoporous thin films; 2) a set of innovative experimental tools that can be used to study a wide variety of nanoporous materials; 3) promotion of processing and application of nanoporous thin films in a wide range of fields such as microelectronics, energy materials, and films and coatings; 4) the involvement of more underrepresented undergraduate students, women and minorities in science and engineering; 5) more outreach opportunities to local high school students and teachers, especially to those economically or educationally disadvantaged students; 6) a larger and more diverse science and technology workforce in the under developed regions at the Inland Empire of Southern California served by UC Riverside.