Miniaturized Waveguide RF MEMS Tunable Filters

“这项奖励是根据2009年美国复苏和再投资法案（公法111-5）资助的。”本研究的目的是开发一种具有独特三维微观结构的波导射频微机电系统可调谐滤波器。该方法是基于1)实现小型化腔体的本体微加工，2)射频微机电系统平面电路开发的表面微加工，以及3)使用垂直信号路由的高纵横比微结构制造来偏置嵌入腔内的平面电路。在智能方面，提出的高度小型化的三维滤波器能够与前端电子器件垂直集成，通过首次结合微制造的三个方面的主要范式转变，创建一个功能齐全的频率灵活的微观结构。该滤波器提供卓越的电气性能，包括超高选择性，宽带调谐，低损耗，高线性度和极低的调谐功耗。提出了一种介电填充的、消失模式的微机械波导滤波器，以提供低损耗，并减少了滤波器相对于其笨重的谐振模式对应的尺寸。平面静电微机电系统电路通过加载制作在腔内的电容柱来完成在非常宽的范围内进行调谐的任务，具有超低功耗和良好的线性度。垂直信号路由提供了一种新的方法来成功地结合二维和三维微观结构，使高性能垂直集成可调谐滤波器成为可能。就更广泛的影响而言，该项目有可能推动新型微加工技术和最先进的微波电路的发展。为超小型、高性能、频率敏捷滤波器提供解决方案，增强了可重构系统的能力，包括软件定义无线电、电子战系统、雷达和仪表系统。此外，还为研究生和大学部学生设立研究课题，为高中教师和学生设立暑期课外活动，以促进教育和外展活动。通过与德克萨斯农工大学的“丰富体验工程”教师暑期研究项目合作，为少数族裔高中教师提供为期一个月的科学和工程研讨会，为少数族裔和未被充分代表的群体探索教育机会。此外，每年的女性工程师协会夏令营也鼓励高中女性加入工程项目。这项工作的研究和教育成果将分发给学术界、工业界和政府部门。

"This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)."The objective of this research is to develop a waveguide radio-frequency micro-electromechanical systems tunable filter as a unique three-dimensional microstructure in silicon. The approach is based on combining 1) bulk micromachining for miniaturized cavity implementation, 2) surface micromachining for radio-frequency micro-electromechanical systems planar circuit development, and 3) high-aspect-ratio-microstructure fabrication to bias the planar circuit embedded inside the cavity using vertical signal routing.With respect to intellectual merit, the proposed highly miniaturized three-dimensional filter enables vertical integration with front-end electronics to create a fully functional frequency-agile microstructure through the major paradigm shift of combining three aspects of microfabrication for the first time. The filter provides superior electrical performance including ultra-high selectivity, wideband tuning, low loss, high linearity and extremely low power consumption for tuning. A dielectric-filled, evanescent-mode, micromachined waveguide filter is proposed to provide low loss, and also to reduce the size of the filter relative to its bulky resonant-mode counterpart. A planar electrostatic micro-electromechanical systems circuit performs the task of tuning over a very wide range with ultra-low power consumption and excellent linearity by loading the capacitive posts fabricated inside the cavity. Vertical signal routing provides a novel approach to successfully combine two and three-dimensional microstructures and make the high performance vertically integrated tunable filter feasible.With respect to broader impact, the project has the potential to advance the development of novel microfabrication techniques and state-of-the-art microwave circuits. Providing a solution for ultra-miniaturized, high performance, frequency-agile filters enhances capabilities for reconfigurable systems including software-defined radios, electronic warfare systems, radars and instrumentation systems. The proposed project also promotes education and outreach activities by creating research projects for graduate and undergraduate students and extra-curricular summer activities for high school teachers and students. Educational opportunities for minorities and under-represented groups will be explored by collaborating with Enrichment Experience Engineering teacher summer research program at Texas A&M University to provide a one month workshop for minority high school teachers in science and engineering. Also, annual Society of Women Engineers summer camps inspire high school women to join the engineering program. The research and educational results of this work will be disseminated to academic, industrial and government sectors.