Investigation of Unconventional Cantilevers for Applications in High Speed Atomic Force Microscopy (AFM)

本研究的目的是探讨非传统的悬臂梁横截面的应用在高速原子力显微镜（AFM）。高速原子力显微镜在纳米制造的质量控制中具有重要意义。这些杠杆将通过聚合物成型技术制造，塑料通过热处理转化为碳化硅。将研究使用标准制造方法制造具有难以（如果不是不可能）的几何形状的无缺陷杠杆的方法。 该项目的智力价值是增加了对用于制造微机电系统（MEMS）的预陶瓷聚合物应用的理解。这项工作将扩大MEMS研究人员可访问的悬臂梁几何的剧目。此外，它将阐明热转换条件在控制这类材料中裂纹形成的作用。这些结果可以应用于任何数量的预陶瓷聚合物的应用。 更广泛的影响是使高速AFM在纳米制造中的质量控制以及允许化学和生物动力学过程的详细成像得到更广泛的使用。更高的谐振频率（以及因此更高的扫描速度）和使用廉价的模制技术制造悬臂梁的能力的组合性能优势将对纳米制造、微电子和生物医学工业具有实质性的益处。该方法的示范，以方便制造碳化硅为基础的MEMS将对微电子工业的国际竞争力产生重大影响。最后，参与该项目的学生将接触到先进的MEMS制造技术，以及在电气和塑料工程，物理，化学和材料科学的交叉点独特的专业知识。特别是，新的视角和创造性的解决问题的技能的发展是不可或缺的跨学科研究的这种性质，将促进学生的成功。

The objective of this research is to investigate unconventional cantilever cross sections for applications in high speed Atomic Force Microscopy (AFM). High speed AFM is of interest for quality control in nanomanufacturing. The cantilevers will be made via polymer molding technology, with the plastic converted via heat treating to silicon carbide. Methods for making defect free cantilevers with geometries that are difficult if not impossible using the standard manufacturing methods will be investigated. The intellectual merit of this project is an increased understanding of application of preceramic polymers for use in making Micro Electro-Mechanical Systems (MEMS). This work will expand the repertoire of cantilever geometries accessible to MEMS researchers. In addition, it will elucidate the role of thermal conversion conditions in controlling the formation of cracks in this class of materials. These results can be applied to any number of applications for preceramic polymers. The broader impact is to enable the wider use of high speed AFM for quality control in nanomanufacturing as well as allowing detailed imaging of chemical and biological dynamical processes. The combined performance advantages of higher resonant frequency (and thus higher scanning speed) and the ability to make cantilevers using inexpensive molding techniques would be of substantial benefit to the nanomanufacturing, microelectronics, and biomedical industries. The demonstration of a method to easily enable manufacturing of silicon carbide based MEMS would have a significant impact on the competitiveness of the microelectronics industry internationally. Finally, students involved in this project will gain exposure to advanced MEMS fabrication techniques, as well as a unique range of expertise at the intersection of electrical and plastics engineering, physics, chemistry, and materials science. In particular, the development of new perspectives and creative problem solving skills is integral to interdisciplinary research of this nature and will foster student success.