SGER: Study soft nanolithography with femtosecond laser irradiations for chemical and gas sensing

[0904445]沈梦燕，麻省大学洛内尔分校，SGER项目，纳米传感器研究方向。2004年发现了一种利用飞秒激光脉冲辐照在不同固体表面上制备纳米尖峰的技术。马萨诸塞大学洛厄尔分校将这种飞秒激光照射技术与软光刻技术相结合，初步开发了软纳米光刻制造技术。该组合技术为设计和提高化学和气体传感器的灵敏度和大大降低成本提供了一种独特的有效工具。这种组合技术可以进一步用于以非常低的成本制造表面增强拉曼光谱（SERS）传感器；并且可以显著提高氧化锡气体传感器对硅纳米结构的灵敏度。本研究项目将利用飞秒激光脉冲辐照技术设计纳米结构，研究纳米光刻制造技术，以精度优于5纳米的聚合物三维复制纳米结构，并以极低的成本用聚合物复制品制造气体（如一氧化碳）和SERS传感器原型。最后，基于这一为期12个月的项目成果，可以建立一个开发集成化学和气体纳米传感器的平台，例如微型电子鼻。

Abstract0904445Mengyan ShenUniversity of Massahusetts,LowellThis is SGER project on nanosensors.A technique for fabricating nanospikes on different solid surfaces with intense femtosecond laser pulse irradiation was found in 2004. This femtosecond laser irradiation technique is combined with a soft lithography to preliminarily develop a soft nanolithographic manufacturing technique at University of Massachusetts Lowell. The combined technique provides a unique effective tool to design and improve the sensitivity of chemical and gas sensors and greatly reduce the cost. This combined technique can be further used to fabricate surface enhance Raman spectroscopy (SERS) sensors at very low cost; and the sensitivity of a tin oxide gas sensor on silicon nanostructures can be significantly increased. In this research project, nanostructures will be designed using the femtoscond laser pulse irradiation technique to study the nanolithographic manufacturing technique to replicate nanostructures three-dimensionally with polymers at precision better than 5 nm, and fabricate gas (for example, carbon monoxide) and SERS sensor prototypes with the polymer replica at very low cost. Finally, based on the results of this 12-month project, a platform to develop integrated chemical and gas nanosensors, for example, microelectronic nose can be built.