Collaborative Research: High Temperature Acoustic Wave Sensors Based on the Oxyborate Crystals

NSF提案ECCS-0925716和eccs -0925586提案题目：“合作研究：基于氧化硼酸盐晶体的高温声波传感器”ECCS-0925716， PI：王庆明，qmwang@engr.pitt.eduUniversity PittsburghECCS- 0925586， PI：张树军和Thomas R. shrout项目本研究的目的是开发基于高温压电晶体的声波传感器，用于在恶劣环境下的温度、热通量和压力的原位测量。提高微传感器的性能和可靠性的需求日益增长，特别是对于那些在高温和恶劣环境下工作的微传感器，导致迫切需要能够超越硅的先进材料。项目内容包括：1)高温表面声波（SAW）谐振器和厚度剪切体声波（BAW）谐振器的设计、制造和表征；2) SAW和BAW传感器的高温特性；3)基于SAW传感器的热流通量传感器和基于BAW传感器的压力传感器的设计、制造和表征；4)高温下传感器性能及稳定性研究。知识优势：目前的声波传感器仅限于室温到300℃的应用范围。本研究项目旨在开发鲁棒超高温（~1000oC）声波传感器，用于先进发电系统的智能控制。两种类型的传感器将基于高温压电晶体SAW和BAW谐振器制造和测试，在高温和恶劣环境下具有理想的热、电和机电性能。更广泛的影响：在过去的几年里，高温和恶劣环境传感器系统的发展吸引了广泛的研究活动，但收效甚微。该研究将通过提供新型高温声波温度和压力传感器，推动传感器技术在恶劣和超高温环境中的应用。该项目将为两名研究生和最多三名本科生提供研究和培训机会。重点将放在招收少数族裔和女性工程专业学生上。将根据该项目的研究活动和成果编写课堂讲座，并纳入现有的研究生课程。每年夏天，通过匹兹堡大学的一个正在进行的项目——皮特工程职业准入项目（PECAP），将为一些有才华的高中生开发和提供实践研究培训机会。

NSF Proposal ECCS-0925716 and ECCS-0925586Proposal title: "Collaborative Research: High Temperature Acoustic Wave Sensors Based on the Oxyborate Crystals"ECCS-0925716, PI: Qing-Ming Wang, qmwang@engr.pitt.eduUniversity PittsburghECCS- 0925586, PIs: Shujun Zhang and Thomas R. ShroutProject Abstract: The objective of this research is the development of acoustic wave sensors based on a high temperature piezoelectric crystal for in situ measurement of temperature, heat-flux, and pressure in severe environments. The increasing demand to enhance the performance and reliability of microsensors, particularly for those operating at high temperatures and harsh environments, results in an urgent need for advanced materials that can outperform silicon. The project includes 1) design, fabrication and characterization of high temperature surface acoustic wave (SAW) resonators and thickness shear bulk acoustic wave (BAW) resonators; 2) high temperature characterization of SAW and BAW sensors; 3) design, fabrication, and characterization of SAW sensors based heat flux sensor, and BAW sensor based pressure sensor; 4) sensor performance and stability study at high temperatures. Intellectual Merits: The current acoustic wave sensors are limited to applications from room temperature to 300oC. This research project aims to develop robust ultrahigh-temperature (~1000oC) acoustic wave sensors for intelligent control of advanced power generation systems. Two types of sensors will be fabricated and tested based on high temperature piezoelectric crystal SAW and BAW resonators with desirable thermal, electrical and electromechanical properties at high temperature and harsh environments.Broader Impacts: Development of sensor system for high temperature and harsh environments has attracted extensive research activities in the past few years but with limited success. The proposed research will advance the sensor technologies for applications in harsh and ultrahigh temperature environments by providing novel high temperature acoustic wave temperature and pressure sensors. The project will provide research and training opportunity to two graduate students and up to three undergraduate students. Emphasis will be given on recruiting minorities and women engineering students. Class lectures will be prepared based on the research activities and results of this project, and included in the existing graduate courses. Hands-on research training opportunities will be developed and provided for some talented high school students each summer through an on-going program at the University of Pittsburgh, the Pitt Engineering Career Access Program (PECAP).