Micro-Optics Based 3D Microfabrication System

该奖项的研究目标是建立一种创新和负担得起的过程，使用基于非传统微光学结构的光学投影系统在非平面衬底上创建复杂的三维微结构。这些微光学器件被精确地制造在任意表面上，该表面可用于在预定义的非平面衬底上投影微细尺度结构，其中光致抗蚀剂的层被旋转涂层。在适当的曝光和显影之后，将在光致抗蚀剂层上产生所需的微细或中微图案。该研究计划包括两个基本部分：(1)利用慢刀伺服超精密加工工艺制造三维微光学元件；(2)非平面衬底上微细观结构的三维投影光刻系统的设计与分析。如果研究成功，将实现大批量、低成本的真正三维微细观结构的制造工艺。这一工艺在许多应用中是对传统光刻的补充，研究结果可以很容易地转化为生产具有微细尺寸特征的光学元件，用于光电子学应用。这项研究对社会的主要好处将体现在它对光学制造的其他几个领域的影响上，包括用于电信、激光和太阳能聚光器应用的波导、微型和衍射光学。这项研究的结果可能会提供一种替代工艺，用于制造具有三维微尺寸通道、泵和储液器的部件，用于生物医学和医疗应用，以及许多其他消费产品。

The research objective of this award is to establish an innovative and affordable process for creating complicated three dimensional microstructures on nonplanar substrates using an optical projection system based on nonconventional micro-optical structures. These micro-optics are precisely fabricated on an arbitrary surface that can be used to project micro and meso scale structures on a pre-defined nonplanar substrate where a layer of photoresist is spin coated. After proper exposure and development, the desired micro or meso pattern will be created on the photoresist layer. The research plan includes two fundamental components: (1) three-dimensional micro-optics fabrication by use of a slow tool servo ultraprecision machining process, (2) design and analysis of a three-dimensional projection lithography system for micro and meso scale structures on nonplanar substrates.If successful, this research will result in a high volume and low cost manufacturing process for true three-dimensional micro and meso scale structures. This process complements conventional photolithography in many applications and the results of the research can be easily converted to producing optical components with micro and meso size features for optoelectronic applications. The major benefits of this research to society will be demonstrated by its impact on several other areas in optical manufacturing, including waveguides, micro and diffractive optics for telecommunication, laser and solar concentrator applications. The results from this research will potentially provide an alternative process for fabricating components with three-dimensional micro size channels, pumps and reservoirs for biomedical and medical applications as well as many other additional consumer products.