FOR 1713: Sensoric Micro- and Nanosystems

除了半导体行业正在进行的缩小趋势之外，基于摩尔定律，还有另一种趋势，称为“超越摩尔”，它描述了不同技术和功能的集成。除了通信、信号和信息处理之外，这种方法使小型化系统能够与环境进行交互。这些系统包含数字和模拟电子、传感器和执行器、无源设备、射频设备、高压电路或生物技术。通过使组件小型化和使用纳米技术，有可能实现新的或改进的功能。智能系统集成是朝着小型化多功能设备和系统发展的趋势。智能系统能够在最小的空间内通过强大的异构组件的相互作用实现复杂的功能。这些系统智能、可靠、经济。它们是适应性的，能量自主的，它们彼此之间交流，与环境交流。目前，德国和欧洲在微系统技术和智能系统集成方面属于全球玩家。未来的智能系统需要集成由最先进的微纳米技术制造的设备和组件，以保持在国际市场上的竞争力。基于纳米结构的新传感器原理的例子是纳米机械系统（NEMS）或使用固态元件作为传感器转换器。这些方法是未来智能系统的基础，但它们离实现还很遥远。该研究单位的目标是这种引领潮流的微观和纳米技术概念，这些概念可以被归为“超越摩尔”的趋势。相关的研究机构可以依靠在设计、制造、封装和表征微系统方面的广泛经验来解决纳米级问题。此外，智能系统集成是开姆尼茨工业大学和弗劳恩霍夫电子纳米系统研究所ENAS的主要研究兴趣。

Beside the ongoing downscaling trend in the semiconductor industry, based on Moore's Law, there exists another trend, called More than Moore, which describes the integration of different technologies and functionalities. This approach enables miniaturised systems to interact with the environment, beside communication, signal and information processing. These systems contain digital and analogue electronics, sensors and actuators, passive devices, RF devices, HV circuits or biotechnology. By miniaturising components and using nanotechnologies it is possible to realise new or improved functionalities. Smart Systems Integration is following this trend towards miniaturised multifunctional devices and systems. Smart Systems are able to realise complex functions within smallest space by interaction of powerful heterogeneous components. These systems are smart, reliable and cost efficient. They are adaptive, energy autonomous and they communicate among one another and with the environment. Currently, Germany and Europe belong to the global players in microsystem technology and Smart System Integration. Smart Systems of the future demand the integration of devices and components fabricated by state of the art micro- and nanotechnologies, for staying competitive at the international markets. Examples for new sensor principles based on nanostructures are nanomechanical systems (NEMS) or the usage of solid-state-components as sensoric converters. These approaches are the base for intelligent systems of the future, but they are far away to be realised. The Research Unit aims at such trendsetting micro- and nanotechnological concepts that can be assigned to the trend 'More than Moore'. The involved research institutions can rely on broad experience in design, fabrication, packaging and characterisation of microsystems to tackle the nano-scale. Furthermore, the Smart System Integration is a main research interest of the Chemnitz University of Technology and the Fraunhofer Institute for Electronic Nano Systems ENAS.