MRI-R2: Acquisition of a Focused Ion Beam - Scanning Electron Microscope (FIB-SEM) for Nano/Micro Fabrication/Characterization

该奖项由2009年美国复苏和再投资法案资助。（公法111-5）”位于洛厄尔的马萨诸塞州大学（UML）请求支持购买最先进的Auriga CrossBeam聚焦离子束扫描电子显微镜（FIB-SEM）卡尔蔡司的工作站，用于研究和研究培训，这对劳动力培训和区域经济发展至关重要。智力优势：与现有的广泛资源互补，FIB-SEM可以同时执行导电和非导电材料的加工和表征，具有一流的分辨率。它将使深入的基础研究和立场UML在纳米制造和塑料工程研究的领导者。虽然一些正在进行的研究项目将受益于所要求的系统，但由于缺乏这种能力而受到阻碍的几个新项目将启动。此外，收购将加强UML？在纳米医学、生物医学设备和生物工程方面，该公司的研究领域发展迅速。最后但并非最不重要的是，将加强与附近大学和当地公司的合作。例子包括具有成本效益的纳米制造系统，高速AFM针尖阵列的高速纳米制造，和纳米粒子药物输送system.Broader影响：所要求的设备将立即影响研究超过20名教员从九个部门。研究生，本科生和K-12学生以及行业专业人士将受益于结合FIB系统的计划。一个独特的“加工”方案将与纳什巴谷技术高中试点，并扩大到当地的技术高中。此外，UML与工业界有着长期的联系，对设备的使用有着灵活的安排。

Abstract"This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)" University of Massachusetts at Lowell (UML) requests support for the acquisition of a state-of-the-art Auriga CrossBeam Focused Ion Beam - Scanning Electron Microscope (FIB-SEM) workstation from Carl Zeiss for research and research training that are critical for workforce training and regional economic development.Intellectual Merit: Complemented with existing extensive resources, the FIB-SEM can simultaneously perform machining and characterization of both conductive and nonconductive materials with best-in-class resolution. It will enable in-depth, fundamental research and position UML among the leaders in nanomanufacturing and plastics engineering research. While a few ongoing research projects will benefit from the requested system, several new programs that have been hindered by this lacking capability will be initiated. In addition, the acquisition will strengthen UML?s fast-growing research areas in nanomedicine, biomedical devices, and bioengineering. Last but not the least, collaborations with nearby universities and local companies will be enhanced. Examples include tooling for cost-effective nanomanufacturing systems, high speed AFM tip arrays for high-rate nanomanufacturing, and nanoparticle drug delivery systems.Broader Impacts: The requested equipment will immediately impact research by more than 20 faculty members from nine departments. Graduate, undergraduate, and K-12 students as well as industry professionals will benefit from programs incorporating the FIB system. A unique "machining" program will be piloted with the Nashoba Valley Technical High School and extended to local technical high schools. In addition, UML has long-standing ties with industry and flexible arrangements for equipment use.