MRI-R2: Acquisition of a Structural Dynamics and Surface Characterization System for Research and Educational Activities on Micro-scale Structures and Devices

该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。该主要研究仪器（MRI-R2）合同的目标是获得最先进的全集成微系统分析仪（Polytec MSA-500）。该工具允许对从厘米到纳米尺度的结构和设备的振动模式进行定量三维测量，包括微型和纳米机电系统（MEMS/NEMS）、微流体和生物系统。测量和量化小尺度材料和结构对动力载荷的响应在许多研究领域都是必不可少的。这类实验通常由于一些严格的要求而变得复杂，例如非接触式技术、对物体整个表面的快速扫描、非常高的位移分辨率以及浸入水溶液中表征样品的能力。该微系统分析仪满足所有这些要求，并将在许多现有项目中进行转型，从MEMS谐振器件（例如陀螺仪和微测压元件）和生物MEMS平台的开发和表征，到射流破裂和微流体系统的基础流体力学研究，以及人耳的生理研究。该微系统分析仪将对几乎所有研究或利用微结构或微设备的研究工作产生重大影响。通过补充设备齐全的洁净室，最先进的显微镜中心和现代材料表征实验室，该工具将为加州大学尔湾分校提供一个独特的机会，推动其自身走向微纳米系统研究的前沿。获得的仪器将提供给各种外部用户从UC的姐妹校园，私立教育机构和当地企业。此外，这个微系统分析仪将打开各种令人兴奋的教育机会：除了很容易整合到现有的课程，它将丰富本科生的研究机会，通过各种既定的举措。最重要的是，它将在培养下一代研究人员方面发挥重要作用。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).The objective of this Major Research Instrumentation (MRI-R2) award is to acquire a state-of-the-art fully-integrated Micro Systems Analyzer (Polytec MSA-500). This tool allows quantitative three-dimensional measurements of the vibration modes of structures and devices ranging from centimeter down to nanometer scale, including micro and nanoelectromechanical systems (MEMS/NEMS), micro-fluids and biological systems. Measuring and quantifying the response of small-scale materials and structures to applied dynamical loads is essential in a variety of research fields. Such experiments are often complicated by a number of stringent requirements, such as non-contact technology, quick scanning of the entire surface of the object, very high displacement resolution, and ability to characterize samples immersed in aqueous solutions. This Micro Systems Analyzer meets all these requirements and will be transformational in a number of existing projects, ranging from the development and characterization of MEMS resonant devices (e.g. gyroscopes and micro-load cells) and bio-MEMS platforms, to fundamental fluid mechanics research on jet breakup and micro-fluidic systems, and physiological studies of the human ear.This Micro Systems Analyzer will critically impact nearly every research endeavor that studies or utilizes microstructures or microdevices. By complementing a fully equipped clean room, a state-of-the-art microscopy center and a modern materials characterization lab, this tool will provide the University of California, Irvine with a unique opportunity to propel itself to the forefront of micro and nano systems research. The acquired instrument will be made available to a variety of external users from UC sister campuses, private educational institutions and local businesses. Further, this Micro Systems Analyzer will open a variety of exciting educational opportunities: besides being readily integrated into existing courses, it will enrich undergraduate research opportunities through a variety of established initiatives. Most importantly, it will play a substantial role in training the next generation of researchers.