Magnetic Field Assisted Nanomachining of Ultraprecision Surfaces

本课题的研究目标是确定磁场辅助纳米加工诱导的纳米尺度材料变形机制，并对纳米加工材料去除机制进行计算建模。该目标的完成将使加工表面粗糙度值小于1纳米的高纵横比组件，如微孔（直径20微米，深度200-250微米）由离子或x射线光刻制造。研究方法包括三个任务。任务1是通过自由磨料加工了解纳米尺度材料的变形机制，这将推动材料去除机制和铁颗粒混合浆料在交变磁场中的运动模型的发展。任务2包括实验，旨在揭示在模拟精加工条件下铁颗粒混合浆的行为和磨料切割运动。Task 1和Task 2的结果为Task 3：优化硅和镍微晶片微孔壁面的表面加工提供了反馈。如果成功，本研究成果将揭示脆性和韧性材料在纳米范围内基于物理能量的表面和次表面变形机制，并为提高表面粗糙度和形状精度提供新的精加工技术。此外，将提出离子和x射线光刻工艺（包括磁场辅助纳米加工作为后处理步骤）的新设计概念，以实现所需的表面功能。这项新技术将导致更高附加值的下一代微机电系统和新兴的纳米机电系统的发展，用于从医疗保健产品到高分辨率天文望远镜的各种设备。该多学科研究计划将为研究生和本科生提供一个刺激的学习环境。研究人员将为代表性不足的本科生开发一个新的指导计划，以建立关系，从而改善支持网络，使学生更好地参与大学工程经验，并提高他们在工程职业生涯中的长期留存率。

The research objective of this project is to determine the nanoscale material deformation mechanisms induced by magnetic field assisted nanomachining, and to computationally model the nanomachining material removal mechanisms. The completion of this objective will enable machining of surfaces with a roughness value less than 1 nanometer for high-aspect-ratio components such as micropores (20 microns in diameter, 200-250 microns in depth) fabricated by ion or X-ray lithographies. The research approach consists of three tasks. Task 1 is to understand the nanoscale material deformation mechanisms by free abrasive machining, which will drive the development of a model of the material removal mechanism and ferrous particle mixed slurry motion in an alternating magnetic field. Task 2 includes experiments designed to reveal the ferrous particle mixed slurry behavior and abrasive cutting motion in simulated finishing conditions. The results obtained from Tasks 1 and 2 provide feedback for Task 3: optimization of the surface finishing of micropore wall surfaces in silicon and nickel microfabricated chips.If successful, the outcomes of this research will reveal the physical energy-based surface and sub-surface deformation mechanisms of brittle and ductile materials in the nanometer range and provide a new finishing technology to improve the surface roughness and form accuracy. Moreover, a new design concept for ion and X-ray lithography processes (including magnetic field assisted nanomachining as a post-processing step) will be proposed to achieve desired surface functionality. This new technology will lead to the development of higher value-added next generation microelectromechanical systems and emerging nanoelectromechanical systems used for a variety of equipment from healthcare products to high-resolution astronomical telescopes. The multi-disciplinary research plan will provide a stimulating learning environment for both graduate and undergraduate-level students. The investigators will develop a new mentoring program for underrepresented undergraduates to create relationships that lead to an improved support network that better engages the students in the university engineering experience and enhances their long-term retention in engineering careers.