SBIR Phase I: Nanometrology using Low-Cost, High Performance and Long Working Range Super-Homodyne Interferometer

该小型企业创新研究（SBIR）第一阶段项目旨在研究一种创新的超零差干涉仪的可行性，用于高精度距离测量，具有长动态范围（比基波波长大两个数量级以上）和高分辨率（小于半波长）。 如果成功的话，这将代表任何报道的基于零差的干涉仪设计的最长工作距离。 这种新装置被称为超零差干涉仪（SHI）。 该创新代表了现有系统的基本而简单的修改，具有与零差干涉仪相同的基本结构，但表现出外差干涉仪的上级性能。 在第一阶段，我们将专注于超零差干涉仪的设计、原型制作、测试和测量。该项目的广泛影响/商业潜力将扩展到许多市场和应用。 干涉仪是测量科学和纳米技术中最基本的工具之一。 干涉仪为精确的距离测量设定了标准，并广泛用于半导体制造、机器人、精密传感、机床、振动测量、激光多普勒测速和激光显微镜等领域。 SHI产品的成功推出将代表着一项重大的工程进步，对测量科学以及基础和应用研究和开发产生巨大影响。

This Small Business Innovation Research (SBIR) Phase I project aims to investigate the feasibility of an innovative, super-homodyne interferometer for high-precision distance measurement with long dynamic range (more than two orders larger than the fundamental wavelength) and high resolution (less than one half-wavelength). If successful, this would represent the longest working distance of any reported homodyne-based interferometer design. The new device is referred to as a super-homodyne interferometer (SHI). The innovation represents a fundamental yet simple modification of existing systems, with the same basic structure as a homodyne interferometer, but exhibiting the superior performance of heterodyne interferometers. In Phase 1, we will focus on the design, prototyping, testing, and measurement of the super-homodyne interferometer.The broader impact/commercial potential of this project will extend to a number of markets and applications. The interferometer is one of the most fundamental tools in measurement science and nanotechnology. Interferometers set the standard for precise distance measurement and are extensively used in the areas of semiconductor fabrication, robotics, precision sensing, machine tools, vibrometry, laser-Doppler velocimetry, and laser microscopy. The successful introduction of SHI products will represent a major engineering advance with a huge impact on measurement science and basic and applied research and development.