MEMS Reconfigurable Subwavelength Metallic Slits for Broadband Terahertz Modulation

本计画的目的是开发并实作一种新型的太赫兹波调变器，并首次利用微机电系统可重新组态的次波长金属狭缝。这种太赫兹调制器利用电磁波通过多层亚波长金属狭缝的低损耗和宽带传输的优点，以提供比现有技术高至少十倍的前所未有的调制带宽。此外，这种太赫兹调制器提供高达100%的调制指数，同时与现有技术相比，虽然理论研究提供了对电磁波与多层亚波长金属狭缝的相互作用的深入理解，但是实验努力提供了开发用于实现完全集成的太赫兹调制器的适当设计和制造工艺的直观见解。将探索各种几何结构以减轻调制电压、调制带宽、调制指数、调制速度和调制器可靠性之间的折衷。 本研究的成果将使太赫兹空间波束形成和开发高性能的基于压缩感知的主动和被动太赫兹成像系统。综合教育活动将培训研究生和本科生进行跨学科研究。

This project is aimed to develop and implement a new type of terahertz modulator by exploiting, for the first time, MEMS reconfigurable subwavelength metallic slits. This terahertz modulator takes advantage of low loss and broadband transmission of electromagnetic waves through multiple layers of subwavelength metallic slits to offer unprecedented modulation bandwidths of at least ten times higher than the prior art. Moreover, this terahertz modulator offers up to 100 percent modulation index while operating at competitive modulation speeds and modulation voltages compared to the state-of-the art. While theoretical investigations provide a deep understanding of electromagnetic wave interaction with multi-layered subwavelength metallic slits, the experimental effort provides an intuitive insight to develop proper designs and fabrication processes for realizing a fully integrated terahertz modulator. Various geometries will be explored to mitigate the tradeoff between the modulation voltage, modulation bandwidth, modulation index, modulation speed, and modulator reliability. The outcome of this research will enable terahertz spatial beam forming and developing high-performance active and passive terahertz imaging systems based on compressive sensing. The integrated education activities will train graduate and undergraduate students on interdisciplinary research.