Sensing Mechanism and Persistence of Semiconductor Gas Sensors on Nanostructured Surfaces

摘要沈梦燕马萨诸塞州，洛厄尔大学本项目的目的是获得一个基本的了解的传感机制，持久性和可靠性的半导体氧化物气体传感器的基板上形成的飞秒激光纳米结构结合软纳米光刻。在室温下，这些最近发现的结构表现出比在450°C下工作的传统半导体气体传感器更高的灵敏度。这消除了诸如高能耗、快速退化和低可靠性的问题。由于低温传感机制不能仅仅归因于基板的高表面-体积比，这些传感器的分子水平的功能将通过基于物理的预测模型进行研究。这项研究的成功成果预计将（a）有助于气体传感和纳米科学与技术领域;（B）提高我们对仿生学在增强探测器功能方面的应用的认识。这项研究将有助于开发出对环境具有积极影响的节能和成本效益高的传感器，从而使消费者和整个社会受益。基于这项研究的教育和推广计划将扩大妇女和其他代表性不足的群体对科学和技术的参与，并培养未来的多学科科学家和工程师。

Abstract1031111Mengyan ShenUniversity of Massachusetts, LowellThe objective of this project is to obtain a fundamental understanding of the sensing mechanism, persistence, and reliability of semiconductor oxide gas sensors on substrates formed through femtosecond laser nanostructuring combined with soft nanolithography. At room temperature, these recently discovered structures exhibit a higher sensitivity than conventional semiconductor gas sensors operating at 450°C. This eliminates problems such as high energy consumption, rapid degradation, and poor reliability. Since the low-temperature sensing mechanism cannot be ascribed solely to the high surface-to-bulk ratio of the substrates, the molecular-level function of these sensors will be studied through a physics-based predictive model. Successful outcomes from this research are expected to (a) contribute to the areas of gas sensing and nanoscience and technology; and (b) enhance our knowledge of applications of bionics in enhancing the functions of detectors. The proposed research will lead to energy-saving and cost-effective sensors with a positive impact on the environment, which benefits consumers and society as a whole.Educational and outreach programs based on this research will broaden the participation of women and other underrepresented groups in science and technology, and train future multidisciplinary scientists and engineers.