Anti-Shock Scheme Based on Dual-Membrane Structure in Capacitive MEMS Sensors and Actuators

本项目的目标是开发一种基于新型双膜结构(DMS)的方案来缓解MEMS传感器和执行器的机械冲击，这是MEMS研究中的一个突出问题。例如，为了最大限度地提高现有MEMS麦克风的灵敏度，隔膜和背板之间的距离需要很小，膜层应该很薄，这会使设备特别容易受到外部冲击。DMS配置代表了一种内在的、自我维持的、实际可实施的控制方案，以对抗机械冲击。将建立一个基于MEMS物理、非线性和同步分析的综合理论/计算/实验范式，以验证所提出的方法。其智力优势在于，强有力的跨学科研究将导致具有非线性控制的新型冲击保护MEMS器件。这项研究将导致具有超可靠性能的新型MEMS传感器和执行器。实现所提出的研究所需的理论/计算/实验范式对于开发生物医学、工业、国防和国土安全应用中的MEMS器件具有革命性意义。更广泛的影响是(1)显著提高对小规模系统基本动力学的理解，(2)使强大的MEMS器件能够在广泛的领域中得到高性能的应用，以及(3)在跨学科意识和技能方面为研究生和本科生创造一个令人兴奋的环境。

The objective of this program is to develop a scheme based ona novel dual-membrane-structure (DMS) configuration to mitigate mechanical shocks for MEMS sensors and actuators,which constitutes an outstanding problem in MEMS research. For example, in order to maximize the sensitivity of an existing MEMSmicrophone, the distance between the diaphragm and backplate needsto be small and the membrane should be thin, rendering the deviceparticularly vulnerable to external shocks. The DMS configuration represents an intrinsic, self-sustained, practically implementable control scheme to counter mechanical shocks. A comprehensive theoretical/computational/experimental paradigm based on MEMSphysics, nonlinear and synchronization analyses will be establishedto validate the proposed approach.The intellectual merit is that the strongly interdisciplinary research will result in novel impact-protected MEMS devices with nonlinear control. The research will lead to a new class of MEMS sensors and actuators with ultra-reliable performances.The theoretical/computational/experimental paradigm required to realize the proposed research is transformative to developingMEMS devices in biomedical, industrial, defense and homeland-security applications. The broader impacts are (1) to advance significantly understanding of the fundamental dynamics of small-scale systems, (2) to enable high-performance applications of robust MEMS devices in a broad range of fields, and (3) to create an exciting environment for graduate and undergraduate students in terms of interdisciplinary awareness and skills.