Improving Sustainability of Atomic Layer Deposition: a Hierarchical Systems Approach

本研究旨在通过层次化系统的方法研究和提高原子层沉积的可持续性能。ALD是半导体制造业中采用的一种关键的使能纳米技术。目前，ALD在太阳能电池、燃料电池、锂离子电池、医疗设备、传感器等广泛的工业应用领域正在快速发展。然而，由于ALD大量使用有毒化学品、可能产生纳米粒子排放以及能源密集型使用，ALD面临着严重的可持续性问题。该项目的目标是研究数学模型和分析工具，以减少ALD纳米制造的环境影响和经济成本，用于工业规模的应用。该项目将以系统的方式进行，将数学建模和实验研究相结合。本项目的具体研究目标是：(1)ALD过程排放的数学建模和实验研究(2)ALD纳米制造系统的热力学流动和能量建模(3)ALD纳米技术在工业生产中的可持续放大。如果成功，这项研究中开发的模型和结果将使ALD和相关行业能够解决ALD纳米技术对环境和社会的长期影响。该模型和结果也可用于类似自下而上纳米技术的可持续管理和改进。该项目的研究成果将通过学术期刊、专业会议和网络媒体广泛传播。因此，这项研究将提高我们对ALD纳米制造的潜在环境影响的理解，并有助于为各个工业部门的ALD生产开发可持续的基础设施。

This research project is to study and improve the sustainability performance of Atomic Layer Deposition (ALD) through a hierarchical systems approach. ALD is a key enabling nanotechnology that has been adopted in the semiconductor manufacturing industry. Currently ALD is under rapid development for a broad array of industrial applications including solar cells, fuel cells, lithium-ion batteries, medical devices, sensors, etc. However, ALD has significant sustainability issues due to its heavy use of toxic chemicals, potential generation of nano-particle emissions, and intensive use of energy. The goal of this project is to research mathematical models and analytical tools for reducing the environmental impact and economic costs of ALD nano-manufacturing for industrial-scale applications. This project will be carried out in a systematic manner that integrates both mathematical modeling and experimental investigations. Specific research goals of this project are: (1) mathematical modeling and experimental investigations of ALD process emissions (2) thermodynamic flows and energy modeling of ALD nano-manufacturing system (3) sustainable scale-up of ALD nanotechnology for industrial productions. If successful, the models and results developed in this study will allow ALD and associated industries to address the long-term environmental and societal implications of ALD nanotechnology. The models and results can also be used in sustainable management and improvement of similar bottom-up nanotechnologies. The research results of this project will be broadly disseminated through academic journals, professional conferences, and internet media. As a result, this research will improve our understanding of the potential environmental impacts of ALD nano-manufacturing and assist in development of a sustainable infrastructure for ALD productions in various industrial sectors.