SBIR Phase I: Ultrahigh Throughput Black Solar Wafer NanoManufacturing for Photovoltaic Energy Application

这个小企业创新研究第一阶段项目旨在开发和提供一种高通量低成本的纳米制造技术，用于在单晶和多晶硅太阳能晶圆的整个表面上制造高密度高均匀性全向抗反射纳米结构。目前，太阳能电池表面的光反射在光电能量转换过程中占很大的损失，因此更好的太阳能晶圆在广泛的入射光波长和角度范围内具有接近零的光反射，将有助于大大提高太阳能电池器件的性能，并有可能降低太阳能电力成本。利用这种独特的加工方法在太阳能晶圆表面制备的硅纳米结构将具有优异的抗反射和捕光性能。在这个项目中太阳能工业兼容的纳米制造方法为零反射？Omni黑色?太阳能晶圆将被开发出来，潜在的加工物理机制将被更好地理解和控制。该项目的更广泛影响/商业潜力是为太阳能工业提供改进的产品和制造技术，并将大学实验室的纳米技术发明应用于高性能太阳能电池的工业生产。所提出的纳米制造技术是一种大规模的批量纳米制造工艺，可以扩大规模，以工业标准的高生产率同时生产大量具有纳米结构表面的太阳能晶圆，并且可以很容易地转化为当前美国的太阳能电池制造业，采用该项目开发的先进纳米制造技术可以生产更便宜且高性能的太阳能电池板。这使得美国的光伏能源成本更实惠，更具竞争力。在这个项目中，纳米技术和可再生能源相结合的努力也将有可能通过将新的工业生产技术发明从实验室转化为工厂，在美国创造新的制造业就业机会。

This Small Business Innovation Research Phase I project proposes to develop and deliver a high-throughput low-cost nanomanufacturing technology for making high-density high-uniformity omnidirectional-antireflection nanostructures on the entire surface of single crystalline and multicrystalline silicon solar wafers. Currently the optical reflection from solar cell surface is accounted for a significant loss in the photoelectric energy conversion process and thus better solar wafers with nearly zero optical reflection across a broad range of incident light wavelengths and angles will help to considerably improve the performance of solar cell devices and potentially bring down the solar electricity cost. The silicon nanostructures created by this unique processing method on solar wafer surface developed in this project will have superior antireflection and light trapping property. In this project the solar industry compatible nanomanufacturing method for zero-reflection ?Omni Black? solar wafers will be developed and the underlying processing physical mechanism will be better understood and controlled. The broader impact/commercial potential of this project is to provide improved product and manufacturing technology for the solar industry and bring nanotechnology inventions from university laboratory to the commercial applications in industrial productions of high-performance solar cells. The proposed nanomanufacturing technology is a large-scale batch nanofabrication process, can be scaled up to simultaneous productions of a large quantity of solar wafers with nanostructured surface at industrial standard high production rate, and may be readily translated into current solar cell manufacturing industry in U.S. Cheaper and yet high-performance solar panels can be produced with the adoption of the advanced nanoscale manufacturing technology to be developed in this project, which makes the photovoltaic energy cost in U.S. more affordable and competitive. The efforts combining nanotechnology and renewable energy in this project will also be able to potentially create new manufacturing jobs in U.S. by translating new industrial production technology inventions from laboratory to factory.