Millimeter-wave Micro and Nano-Ferrite Circulators Integrated in CMOS

该计划的目标是利用工作在10 GHz至100 GHz范围内的纳米和微米六角铁氧体材料，开发集成在CMOS中的下一代宽带毫米波环行器。提出的研究目标将在低成本、小型化毫米波设备和技术这一新兴领域具有革命性意义。该方法是基于微米和纳米尺寸的六方铁氧体晶体，具有很强的内部各向异性磁场，在没有强磁场的情况下，可以在毫米波范围内提供很强的铁磁共振。将开发与标准最先进的商业cmos工艺兼容的后处理。该项目的智能优点是开发了新型微带环行器，并采用微纳米铁氧体材料为全系统片上毫米波集成电路提供了创新的后处理方法。对纳米铁氧体和微米铁氧体的介电和磁性进行了全面的表征研究。这项研究将扩大目前关于微纳尺寸铁氧体基本特性的知识体系，以及在CMOS基板上组装单向磁场铁氧体层的技术。该计划的更广泛影响包括：(I)利用铁氧体材料在低成本硅cmos工艺中开发高频毫米波电路，以实现从相控阵雷达到军事无线收发机以及卫星通信等关键应用的高性能部件；(Ii)为学生提供铁氧体材料科学、电磁波、毫米波电路、半导体加工以及无线网络和雷达等应用领域的跨学科培训，特别注重将代表性不足的群体纳入科学和工程领域；以及(Iii)通过公开讲座、网站、杂志文章和本科课程材料，向更广泛的受众传播拟议的设备开发和研究的令人兴奋的跨学科性质，从而实现外展。

The objective of this program is to develop the next generation broadband millimeter-wave circulators integrated in CMOS using nano- and micro-hexaferrite materials operating in the 10 GHz to 100 GHz range. The proposed research objectives will be revolutionary in the emerging area of a low-cost, miniaturized millimeter wave devices and technology. The approach is based on micro- and nano-sized hexagonal ferrite crystalline with strong internal anisotropic magnetic field which can provide strong ferromagnetic resonance in the millimeter wave length without strong external magnetic field. The post-processing compatible with the standard state-of-art commercial CMOS process will be developed. The intellectual merit of this program is the development of novel microstrip circulators and the innovative post-processing methods for complete system on-chip millimeter-wave integrated circuits in CMOS using micro- and nano-ferrite materials. A comprehensive characterization study will be performed to analyze the dielectric and magnetic properties of nano- and micro-ferrite. The study will expand the current body of knowledge on fundamental characteristic properties of micro- nano-size ferrites, and techniques to assemble unidirectional field ferrite layers on CMOS substrates. The broader impacts of this program include: (i) developing the high-frequency millimeter-wave circuits in low-cost silicon CMOS processes with ferrite materials which enable the realization of high-performance components for critical applications ranging from phased-array radar to wireless transceivers for military as well as for satellite communications; (ii) providing interdisciplinary training to students in ferrite material science, electromagnetic waves, millimeter wave circuits, semiconductor processing, as well as in application areas such as wireless network and radar, with a particular focus on inclusion of members of underrepresented groups in science and engineering; and (iii) enabling outreach by communicating to a wider audience, the exciting interdisciplinary nature of the proposed device development and the research it will enable, through public lectures, websites, magazine articles, and undergraduate course material.