SBIR Phase I: Ultra Low Power Electrostatic Switch Relay for Vibration Energy Harvesting

这个小企业创新研究（SBIR）第一阶段项目提议开发一种超低功耗静电开关继电器，用于管理超低功耗能量收集。能量收集的正常电源管理，包括控制收集能量的释放和存储，已经通过基于cmos的开关或微控制器完成。不幸的是，硅基控制器至少要消耗几微瓦的能量。因此，在可用功率小于运行能量管理开关或微控制器所需功率的情况下，将不会收集能量。作为解决方案，拟议的研究将提供一种静电开关继电器的开发，它将利用低驱动电压（1.5-5V）。在第一阶段，将通过开发和测试原型来证明该开关的可行性。将追求以下技术目标：(1)模拟长悬臂/短间隙设计，(2)开发原型设备，(3)测试和评估原型设备。首席研究员假设所提出的开关的驱动电压小于5V，这将证明该解决方案是可行的。该项目更广泛的影响/商业潜力包括能够回收由设备环境中的太阳能、振动或热源提供的更暗、更随机和极低干扰的能量。通过将这项技术商业化，将提供一种设备，可以收集通常太少而无法回收、保存和再利用的电力。低驱动电压的无功率开关将成为市场上无处不在的能量收集的关键部件。寻找自给自足的远程控制系统或安装在飞机机身或建筑物中的传感器的公司将对该产品感兴趣。所提出的解决方案是更好的竞争设备，因为它利用超低能量收集的低功耗管理策略。竞争对手的设备要么需要高电压，要么需要消耗更多的电力。

This Small Business Innovation Research (SBIR) Phase I project proposes to develop an ultra-low-power electrostatic switch relay for the purpose of managing ultra-low-power energy harvesting. Normal power management for energy harvesting, which involves controlling the release and storage of the collected energy, has been accomplished with CMOS-based switches or microcontrollers. Unfortunately, silicon based controllers consume at least a few microwatts of energy. Thus, in a scenario in which the available power is less than that required to run the energy-managing switch or microcontroller, no energy will be harvested. As a solution, the proposed research will provide the development of an electrostatic switch relay, which will utilize low actuate voltage (1.5-5V). In Phase I, the feasibility of this switch will be proven by developing and testing a prototype. The following technical objectives will be pursued: (1) simulate a long-cantilever/short-gap design, (2) develop a prototype device, and (3) test and evaluate the prototype device. The principal investigator hypothesizes an actuation voltage less than 5V for the proposed switch, which will prove that this solution is feasible.The broader impact/commercial potential of this project includes enabling the recovery of darker, more random, and extremely low disturbance energy provided by solar, vibration, or heat sources in the environment of the device. By commercializing this technology, a device will be offered that can harvest power that is normally too little to be recovered, saved, and reused. A no-power switch with low actuation voltage would be adopted as a key component in the market for ubiquitous energy harvesting. Companies looking for a self-sustained remote control system or for sensors to be installed in the fuselage of airplanes or in buildings would be interested in this product. The proposed solution is better competing devices because of the low power-managing strategy it utilizes for ultra-low energy harvesting. Competing devices either require high voltage or need to consume more power.