STTR Phase II: Complementary metal oxide semiconductor (CMOS) integrated piezoelectric vapor sensors

这个小型企业创新研究（SBIR）第二阶段项目的更广泛的影响/商业潜力是提高工业，商业和住宅设施中易燃气体泄漏的人员安全。此外，该技术通过解决碳排放的主要来源之一，即石油和天然气设施的甲烷排放，为应对气候变化做出了贡献。 该技术能够缓解甲烷和制冷剂泄漏，这在石油，天然气和HVACR（供暖，通风，空调和制冷）市场构成了重要的市场机会。这项创新可能会解决阻碍物联网（IoT）应用广泛采用普适气体传感的重要技术瓶颈。作为一个使能系统，它可以用于各种其他应用领域，如爆炸物检测，麻醉品，化学武器，室内空气质量监测，通过呼吸分析诊断疾病。这个小型企业技术转让二期项目旨在开发一种气体传感器，具有无与伦比的尺寸，功率和成本的组合，同时提供高检测性能。所提出的架构直接在CMOS（互补金属氧化物半导体）集成电路芯片的后端制造高频体声波谐振器，这允许低成本，大规模生产和改善的传感器的噪声特性。直接共整合还允许制造受体阵列以获得来自多个目标分析物的响应，所述多个目标分析物可用于对材料进行分类并用于针对环境混杂因素的实时校准。本计画的目标是研制一种基于共整合压电材料的单晶片气体感测器。这项工作将包括在硅电路上集成谐振器阵列的设计、制造和表征;芯片与受体材料的集成，允许目标气体分子的选择性吸附;以及评估气体传感性能的测试。该奖项反映了NSF的法定使命，并通过使用基金会的智力价值和更广泛的影响审查标准进行评估，被认为值得支持。

The broader impact/commercial potential of this Small Business Innovation Research (SBIR) Phase II project is to improve personnel safety from flammable gas leaks in industrial, commercial, and residential facilities. Additionally, the technology contributes to combating climate change by tackling one of the leading sources of carbon emissions, methane emissions from oil and gas facilities. The technology enables the mitigation of methane and refrigerant leaks that constitutes a significant market opportunity in the oil, gas and HVACR (heating, ventilation, air conditioning and refrigeration) markets. The innovation may solve important technical bottlenecks that have prevented widespread adoption of pervasive gas sensing in Internet of Things (IoT) applications. As an enabling system, it may be utilized in a variety of other applications area such as the detection of explosives, narcotics, chemical weapons, indoor air quality monitoring, and diagnosis of disease via breath analysis.This Small Business Technology Transfer Phase II project seeks to develop a gas sensor with an unparalleled combination of size, power, and cost while offering high detection performance. The proposed architecture fabricates high-frequency bulk acoustic resonators directly on the backend of CMOS (Complementary Metal Oxide Semiconductor) integrated circuit chips which permits low-cost, mass-production and improved noise characteristics of the sensors. The direct co-integration also allows the fabrication of a receptor array to obtain responses from multiple target analytes that can be used to classify materials and for real-time calibration against environmental confounders. The objective of this project is the development of a single-chip gas sensor based on co-integrated piezoelectric materials. This effort will consist of the design, fabrication and characterization of integrated resonator arrays onto silicon circuits; integration of the chips with receptor materials, allowing selective adsorption of target gas molecules; and testing to assess the gas sensing performance.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.