Fast 2D Beam Steering Device Integrated Directly on High Power VCSEL arrays

高速光束转向对于许多新兴应用至关重要，包括自动驾驶、增强现实、自由空间通信、3D传感和成像系统。大多数现有的解决方案依赖于机械运动来操纵光束方向，这是缓慢且笨重的。本项目的目的是研究一种基于耦合双层光子晶体腔电调谐的快速二维光束控制器件，该器件直接集成在高功率垂直腔面发射激光器（VCSEL）阵列上。高速相位调谐可以用半导体材料的折射率的电控制来实现。利用半导体激光技术、集成光子技术和纳米光子技术的进步，所提出的解决方案可以实现非常紧凑的尺寸、低功耗和高可靠性。纳米光子腔与高功率VCSEL阵列的协同设计可以为高性能激光探测和测距（LiDAR）系统提供突破性技术。此外，该项目还提供了一个学生教育和培训的平台，帮助培养光子学和光学、传感和成像、纳米技术和制造领域的多元化劳动力。相位控制可以在单层和双层耦合光子晶体板中实现。高速调制/调谐在电子控制下是可行的。透射式和反射式相位调谐元件都可以通过形成用于高速空间光调制器（SLM）和光学相控阵列（OPA）的阵列来实现。这里的目的是调查一些基本的挑战，对高扫描速度光束转向OPA结构集成的高功率VCSEL能够在1 GHz的速度和以上的全相位控制。通过该项目，将解决与集成OPA/VCSEL相关的各种挑战。集成的模块化解决方案可以简化光学设计和组装，实现紧凑可靠的LiDAR和光束控制应用。所提出的方法具有以下创新特征：（1）高速：该结构可以在GHz范围内工作，这将比基于机械扫描技术或传统空间光调制器（SLM）技术的其他方法快2-3个数量级。(2)可靠性：该结构基于OPA与VCSEL的共同设计和共同封装，具有简化的光束路由方案和机械集成结构。 (3)可扩展：提出的结构体系结构是平面的，CMOS兼容，并可扩展的2D，这确保了其制造的可扩展性和器件像素的可扩展性。这个奖项反映了NSF的法定使命，并已被认为是值得通过使用基金会的智力价值和更广泛的影响审查标准进行评估的支持。

Optical beam steering at high speed is of critical importance for many emerging applications, including autonomous driving, augmented reality, free space communications, 3D sensing and imaging systems. Most existing solutions rely on mechanical movements to steer the light beam direction, which is slow and bulky. The objective of this project is to investigate a fast 2D optical beam steering devices based on the electrical tuning of coupled bi-layer photonic crystal cavities directly integrated on high power vertical cavity surface-emitting laser (VCSEL) arrays. High speed phase tuning can be accomplished with the electrical control of refractive index of the semiconductor material. Leveraging the advances in semiconductor laser technology, integrated photonics technology, and nanophotonics, the proposed solution can result in very compact size, low power consumption, and high reliability. Co-design of nanophotonic cavity with high power VCSEL arrays can provide a disruptive technology for high performance laser detection and ranging (LiDAR) systems. Additionally, the project offers a platform for student education and training, help preparation of diversified workforces in photonics and optics, sensing and imaging, nanotechnology, and manufacturing.Phase control can be achieved in single and bi-layer coupled photonic crystal slabs. High speed modulation/tuning is feasible with electronic control. Both transmissive and reflective phase tuning elements can be realized with the formation of arrays for high speed spatial light modulators (SLMs) and optical phased arrays (OPAs). The objective here is to investigate some fundamental challenges towards a high scanning speed beam steering OPA structure integrated with high power VCSELs capable of full phase control at 1 GHz speed and above. With this project, various challenges associated with the integrated OPA/VCSEL will be addressed. The integrated modular solution can result in simplified optical design and assembly for compact and reliable LiDAR and beam steering applications. The proposed approach has the following innovative features: (1) High speed: The structure can operate at GHz regime, which will be 2-3 orders of magnitude faster than other approaches based on mechanical scanning technique or conventional spatial light modulator (SLM) technologies. (2) Reliable: The structure is based on co-design and co-packaging of OPAs with VCSELs with simplified optical beam routing schemes and mechanical integration structures. (3) Scalable: The proposed structure architecture is planar, CMOS compatible, and scalable in 2D, which ensures its manufacturing scalability and device pixel scalability.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.