Equipment: MRI: Track 2 Acquisition of the Thermo Fischer Cryogenic Helios 5 CX DualBeam for Materials Science

现代材料科学的跨学科领域集中在越来越小的尺度上，以理解和操纵材料的光学、机械、电学和热性能，包括自然存在的以及人造的、工程的材料。在纳米尺度上研究材料的显著进展是由先进的、最先进的纳米加工工具实现的，用于雕刻大块材料，创建和成像纳米尺度特征。聚焦离子束（FIB）技术是最通用的纳米制造和纳米成像方法之一，广泛应用于最新一代微电子系统、微流控芯片、光子和生物医学设备的开发。最近，低温FIB的发展进一步扩大了其能力，特别是在表征含有软相和液相的材料和系统时，同时保持了样品的完整性。Thermo Scientific™Helios™5 CX DualBeam仪器提供了在室温和低温下处理样品的独特机会。其低温惰性气体样品转移系统能够在低温下将样品安全转移到手套箱和其他仪器，而无需将其暴露在环境条件下。该仪器有助于杜克大学共享材料仪器设施的教育使命，并在三角研究和三角研究领域使研究生，本科生，少数民族和女学生的不同人群能够制备纳米或微流体通道，纳米线的沉积，以及微机电系统的制造和表征。Thermo Fischer科学低温Helios 5 CX双光束材料科学是一种集成FIB和扫描电子显微镜仪器，能够灵活地执行纳米制造，光刻，体积成像和原位测量。该仪器中更灵活的离子束柱的发展和原位冷却能力也减少了Ga+注入和离子和电子束辐照引起的加热对样品表面的有害影响，并使光束敏感，柔软和液体材料的研究成为可能。FIB的低温阶段对于微电子、储能材料和二维材料的扫描电子显微镜分析和透射电子显微镜样品制备尤其关键，这些材料对离子和电子束非常敏感，只能在冷却温度下成像和切片。Thermo Fischer Scientific Cryogenic Helios 5 CX DualBeam支持许多前沿研究项目，包括用于亚波长分辨率成像的双曲元结构的纳米制造，硬-软材料界面的表征，其中制备非常光滑的表面，暴露具有硬域的未损坏聚合物是至关重要的，碱离子电池中阴极-电解质界面的研究，高性能锂金属电池复合材料的分析，超导体-量子霍尔杂化结构的干涉效应研究，超高分辨率成像以及在集中阳光下实现太阳氨合成的等离子体催化剂的催化剂载体的表征。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

The interdisciplinary field of modern materials science focuses on an increasingly smaller scale for understanding and manipulations of optical, mechanical, electrical, and thermal properties of materials, including naturally existing as well as with man-made, engineered materials. Remarkable progress in studying materials on the nanometer-scale is enabled by the advanced, state-of-the-art nanofabrication tools for carving bulk materials, creating and imaging nanoscale features. One of the most versatile nanofabrication and nano-imaging approaches relies on the focused ion beam (FIB) technique, widely used in the development of the latest generation of microelectronic systems, microfluidic chips, photonic and biomedical devices. Recently, the development of cryogenic FIB has further expanded its capabilities, particularly in characterizing materials and systems containing soft and liquid phases, while maintaining sample integrity. The Thermo Scientific™ Helios™ 5 CX DualBeam instrument offers a unique opportunity of handling samples at both room and cryogenic temperatures. Its cryogenic inert-gas sample transfer system enables the safe transfer of samples to gloveboxes and other instruments under cryogenic temperatures, without exposing them to ambient conditions. The instrument contributes to the educational mission of Shared Materials Instrumentation Facility at Duke and in the Research Triangle and Triad Areas enabling the diverse population of graduate, undergraduate, minority and female students to prepare nano- or microfluidic channels, deposition of nano-wires, and fabrication and characterization of micro-electro-mechanical systems. The Thermo Fischer Scientific Cryogenic Helios 5 CX DualBeam for Materials Science is an integrated FIB and scanning electron microscope instrument, enabling a plethora of flexibility to perform nanofabrication, lithography, volumetric imaging, and in-situ measurements. The development of more flexible ion beam columns and in-situ cooling capabilities in this instrument also reduce detrimental effects of Ga+ implantation and ion and electron beam irradiation-induced heating on the sample surface and enable studies of beam-sensitive, soft, and liquid materials. A cryogenic stage in a FIB is especially critical to scanning electron microscopy analysis and transmission electron microscopy specimen preparations for microelectronic, energy storage materials, and two-dimensional materials, which are extremely sensitive to ion and electron beams and can only be imaged and sectioned at cooled temperatures. The Thermo Fischer Scientific Cryogenic Helios 5 CX DualBeam enables a number of cutting-edge research projects including nanofabrication of hyperbolic metastructures for imaging with subwavelength resolution, characterization of hard-soft material interfaces where preparation of a very smooth surface exposing undamaged polymer with the hard domains is critical, studies of cathode-electrolyte interfaces in alkali-ion batteries, analysis of high-performance composites for lithium-metal batteries, investigation of interference effects in superconductor-quantum Hall hybrid structures, ultra-high-resolution imaging and characterization of the catalyst-support for plasmonic catalysts enabling solar ammonia synthesis under concentrated sunlight.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.