SBIR Phase II: Innovative Glass Inspection for Advanced Semiconductor Packaging

小型企业创新研究(SBIR)第二阶段项目的更广泛/商业影响是促进半导体行业的发展。拟议技术的开发将促进高质量电子产品的创造，并降低高质量电子产品的成本，这些产品包括智能手机、笔记本电脑、电视、AR/VR设备、5G组件和数据存储设备，这些产品将可供个人消费者商业使用。这一研究项目将为美国半导体产业的振兴带来巨大的社会效益，为美国创造更多就业机会，增强国家安全，降低半导体器件对篡改和假冒的脆弱性，并使美国在全球市场上具有竞争优势。这一小型企业创新研究(SBIR)第二阶段项目将创造出技术，促进高质量电子产品的创造，这些产品将可供个人消费者商业使用。越来越多的玻璃面板用于半导体封装，这为开发技术提供了机会，该技术将对这些面板进行全面的表面缺陷检查。对于≥300 mm玻璃基板上直径为300 nm的≤颗粒，尚无纳米颗粒检测技术，例如用于先进半导体封装的颗粒。这种高度敏感的过程控制技术的成功开发将解决这些玻璃检查痛点，并大幅提高半导体封装公司的产量。该奖项反映了NSF的法定使命，并通过使用基金会的智力优势和更广泛的影响审查标准进行评估，被认为值得支持。

The broader/commercial impact of this Small Business Innovation Research (SBIR) Phase II project is to enhance the semiconductor industry. The development of the proposed technology will advance the creation of and reduce the cost of high-quality electronic products such as smartphones, laptops, televisions, AR/VR devices, 5G components, and data storage devices that will be commercially available to individual consumers. This research project will have a substantial societal benefit on the revitalization of the US semiconductor industry by creating more American jobs, boosting national security and reducing the vulnerability of semiconductor devices to tampering and counterfeiting and giving the US a competitive edge in the global market.This Small Business Innovation Research (SBIR) Phase II project will create technology that will advance the creation of high-quality electronic products that will be commercially available to individual consumers. The increasing use of glass panels for semiconductor packaging presents an opportunity to develop technology which will perform full surface inspection of these panels for defects. No nano-particle inspection technology exists for ≥300 mm glass substrates for particles ≤300 nm in diameter, such as those used in advanced semiconductor packaging. The successful development of this highly sensitive process control technology will address these glass inspection pain points, with substantial improvements in yield for semiconductor packaging companies.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.